An integrated pressure-flow sensor for correlation measurements in.pdf

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1、ACTUi'[ORSAPHYSICALELSEVIERSensorsandActuatorsA52(1996)51-58Anintegratedpressure-flowsensorforcorrelationmeasurementsinturbulentgasflowsEdvardK~ilvestena,ChristianVieiderb,LennartL6fdahlc,G6ranStemme~aDepartmentofSignals,SensorsandSystems,RoyalInstituteofTechnology,S

2、-10044Stockholm,SwedenbIndustrialMicroelectronicsCenter,S-16421Kista,SwedencThermoandFluidDynamics,ChalmersUniversityofTechnology,S-41296Gothenburg,SwedenAbstractAnewintegratedpressure-flowsensorhasbeenspeciallydesignedformeasurementsinturbulentgasflows.Thepressurese

3、nsorisbasedonpolysilicondiaphragmtechnologyandtheflowsensoronthegascoolingofapolyimide-insulatedheatedmass.Withapressure-sensordiaphragmareaof100/xm×100/xm,aflow-sensorhot-chipareaof300/xmX60/xmandanedge-to-edgedistanceof100/xmbetweenthedifferentsensorareas,thesmalle

4、steddiesintechnicallyinterestingturbulentflowscanberesolvedandmeasured.Thepressure-sensordesignshowsaflatfrequencyresponsecurvewithin+2dBbetween10Hzand10kHzwithanacousticsensitivityof0.9/zVPa-~forasupplyvoltageof10V.Theflowsensorhasathermalresponsewithatimeconstantof

5、7msandaresponsetimeof25/xswhenthesensorisoperatedatconstanttemperatureusingfeedbackelectronics.Themeasuredsteady-stateflow-sensorpowerdissipationinaturbulentwallboundarylayeratanovertemperatureof100°CwasP=34+0.4%0.47mWwhere%isthetime-averageflow-dependentwallshearstr

6、ess.Theintegratedsensorhasbeenusedforsimultaneousmeasurementoffluctuatingpressureandwallshearstressinaturbulentboundarylayeryieldingpressure-wallshearstresscorrelationcoefficientsneverpreviouslypresented.Keywords:Flowsensors;Pressuresensors;Turbulence1.IntroductionTh

7、ispaperpresentstheintegrationofthetwosensingfunc-tionsspeciallydesignedforturbulencemeasurements.TheToday'srapiddevelopmentofcomputershasintroducedflowsensorisbasedonthegascoolingofapolyimide-insu-flowoptimizationintoawidespectrumofindustrialappli-latedelectricallyhe

8、atedmassandthepressuresensoronthecations.Thiscallsforsophisticatedturbulencemodels,whichpiezoresistivityofpolysiliconstraingaugeslo