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1、HANDBOOKOFTHIN-FILMDEPOSITIONPROCESSESANDTECHNIQUESPrinciples,Methods,EquipmentandApplicationsSecondEditionEditedbyKrishnaSeshanIntelCorporationSantaClara,CaliforniaNOYESPUBLICATIONSWILLIAMANDREWPUBLISHINGNorwich,NewYork,U.S.A.Copyright©2002byNoyesPublicationsNopartofthisbookmayberepro
2、ducedorutilizedinanyformorbyanymeans,elec-tronicormechanical,includingphotocopying,recordingorbyanyinformationstorageandretrievalsystem,withoutpermissioninwritingfromthePublisher.LibraryofCongressCatalogCardNumber:2001135178ISBN:0-8155-1442-5PrintedintheUnitedStatesPublishedintheUnited
3、StatesofAmericabyNoyesPublications/WilliamAndrewPublishing13EatonAvenueNorwich,NY138151-800-932-7045www.williamandrew.comwww.knovel.com10987654321LibraryofCongressCataloging-in-PublicationDataHandbookofThin-FilmDepositionProcessesandTechniques/[edited]byKrishnaSeshan.--2ndeditionp.cm.I
4、ncludesbibliographicalreferencesandindex.ISBN0-8155-1442-51.Thinfilmdevices--Designandconstruction--Handbooks,manuals,etc.I.Seshan,Krishna.II.Title.TK7872.T55H362001135178621.381'72--dc19CIPNOTICETothebestofourknowledgetheinformationinthispublicationisaccurate;howeverthePublisherdoesno
5、tassumeanyresponsibilityorliabilityfortheaccuracyorcompletenessof,orconsequencesarisingfrom,suchinformation.Thisbookisintendedforinformationalpurposesonly.MentionoftradenamesorcommercialproductsdoesnotconstituteendorsementorrecommendationforusebythePublisher.Finaldeterminationofthesuit
6、abilityofanyinformationorproductforusecontemplatedbyanyuser,andthemannerofthatuse,isthesoleresponsibilityoftheuser.Werecommendthatanyoneintendingtorelyonanyrecommendationofmaterialsorproceduresmentionedinthispublicationshouldsatisfyhimselfastosuchsuitability,andthathecanmeetallapplicab
7、lesafetyandhealthstandards.MATERIALSSCIENCEANDPROCESSTECHNOLOGYSERIESSeriesEditorsGaryE.McGuire,MicroelectronicsCenterofNorthCarolinaStephenM.Rossnagel,IBMThomasJ.WatsonResearchCenterRointanF.Bunshah,UniversityofCalifornia,LosAngeles(1927–1999),foundingeditorElectronicMaterialsandPro
