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1、stateRechargeableThin-filmLithiumBatteriesCHINESEJ()URNALOFCHEMlCAIPHYSICSVOLUME19,NUMBER6DECEMBER27,2006ARTICLEPhysicalandElectrochemicalCharacterizationofLiCoo.sMo.202(M=Ni,Zr)CathodeFiImsforAll—solid.stateRechargeableThin—fi1mLithiumBatteriesChi—linLi,Wen—yuanLiu,Zheng
2、—wenFuDepartmentofChemistry&LaserChemistryInstitute,ShanghaiKeyLaboratoryofMolecularCatalystsandInnovativeMaterials,FudanUniversity,Shanghai200433,China(Dated:ReceivedonApril24,2006;AcceptedonJune15,2006)I,iCo0,8M0.2O2(M=Ni,Zr)flintswerefabricatedbyladiofrequencysputt
3、eringdepositioncombinedwithco11Wntiol1alanneallrIlIlethods.ThestructtiresofthefilmswerecharacterizedwithX—raydiffraction(xRD),Ra.1anspectroscot)vandscanningelectronmicroscopy(SEM)techniques.Itwasshownthatthe700.C—annealedLiCo08M1,02hasan—NaFeO2likelayeredstruc1tli'eAll—so
4、lid—st,atcthin—filmbattelios(TFBs)wcrcbricatedwiththesefilmsas1,hecathode.dTl(1theirelectroc}l0Inicalperformanceswereevaluated.Itwa,qfoundthatdopingofelectrochemicallyactiveNiandinactiveZrhasdifferenteffectsonthestruetuI'alandelcclrochemiea1propeI?tiesoftheLiCeO2cathodefi
5、hnsNidopinginereasesthedischargecapacityofthefilmwtfileZrdopingimprovesitscyclingstability,Keywords:CathodernaterialsAll—solid—statethinfilmbatteries,RadiofrequencysputteringI.INTR0DUCT10NWiththedevelopmentoftilemicro—scalepi'ocess—lngtechniquesandmaterials,electronicdevi
6、cesarebe—comingsmallerandmorepz'ecise,Thistendencyhaspromptedthedevelopmentofall—.solidstatethin—filmbatteries(TFBs)l1,21asefficient,lightweight,compactpowersources.AnattempttointegrateTFBsintoCOH1一plementaryrneta1oxideserniconductorfCM0S)nlenl—orychipshast)ecilInadeat0ak
7、RidgeNationalLabo—ratory『3],Intileile&rftltllreanextensionofTFBap—plicationstoulicloelectromechanicallsystelnsfMEMS)inchldinginicrosensorsandnlicroactuatorsiSexpeeted.Iti8importanttoexploreadvancedcathodicmateri—alsforhighpox'fornlanceTFBs.Ttiecathodesoflayere(1sti-uc
8、tureSllChasLiCeO2.LiNiO2all(1LiMn02havebeenwidelyinvestigatedSOII1Cinforlnationonthe[4—11].These
