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1、哈尔滨工业大学工学硕士学位论文AbstractElectromechanicalsystemandstructureminiaturizationhavebecomeamainstreamtrendinthedevelopmentofmachineryindustry.Micro-holepart,asoneofthemostbasicpartsinmicro-electromechanicalsystem,iswidelyusedinaerospaceengines,artificialbloodvesselscaffold,fuelnozzle,etc.Micro-holeparts
2、havesmallsize,cancarrylowloadandtheirsurfacequalityoftendeterminetheirperformance,sotheresearchesonthesurfacequalityisofgreatimportance.Microelectricdischargemachiningisoneofthecommonly-usedmethodsincurrentmicro-holemachining,butthemicro-holesprocessedinthiswayhavealotofdefectssuchasheavyrecastla
3、yer,cracks,burraswellassurfaceroughnessandbiggersurfacetaper.Inordertosolvetheproblem,thethesisputsforwardthemethodofelectrochemicalmechanicalcompositepolishingprocessingofmicro-holebyusingelectricdischargemachiningsoastogreatlyimprovethesurfacequalityofpartsonthebasisofthehighefficiency.Basedont
4、heanalysisoftheprocessconditionsofmicro-holecombinationrequires,thecombinationmachiningplatformintegratingblockelectrodeelectrosparkinggrinding,electricdischargemachiningandelectrochemicalmechanicalcompositepolishingprocessingisestablished.Besides,thefundamentalexperimentalstudyofthecombinedtechn
5、ologyofelectricdischargemachiningandelectrochemicalmechanicalcompositepolishingisconductedontheprocessingplatform;Φ120µmmicroelectrodeisprepared;thecombinedelectricdischargemachiningparameterssuchasappropriatevoltage,current,capacitanceandpulsewidthareselected;themicro-holesurfacequalityofelectri
6、cdischargemachiningandcombinedprocessingiscompared;theproperprocessingtime(around90s)ofelectrochemicalmechanicalcompositepolishingisselected.Thesimulationisconductedonthegapflowfieldofmicro-holeprocessedbyelectrochemicalmechanicalcompositepolishingmethod;thevelocitydistribution,particleconcentrat
7、iondistributionandmotioncurveofgapflowfieldunderthedifferentconductionsofelectrodefeedspeedandparticlemassconcentrationareanalyzed.Onthebasis,theinfluenceofprocessingvoltage,pulsewidth,electrodefeedspeedandparticlemass