Good working practices.pdf

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1、EBSDSystemDetailsEBSDSetUp:•NordlysIIDigitalDetector•CHANNEL5software•LEOSupra55VPFEGSEMAnalysisSetUp:•Camerarunat672x512pixelresolution(“2by2”binning)Preparingfordatacollection•Limitsamplesizeandpositioning•Limitstagemovement•UseIRchamberscope•Checkbeforeclosingcham

2、ber•InsertdetectorafterfocusingGeneralcare•Phosphorscreen•Camera•GroundingandearthingOptimisingSEMconditionsOptimumoperatingconditionsofaSEMarecrucialinobtaininghighresolutions.Theimportantoperatingconditionsare;•Tiltangle•Accelratingvoltage•Probecurrent•Workingdista

3、nceSummaryofProbeCurrentsatthedifferentSEMconditionsusedforthisstudyAccV30micron60micron120micronapertureapertureaperture10kV0.52nA1.1nA2.41nA15kV0.66nA1.32nA3.14nA20kV0.81nA1.45nA3.82nA25kV0.95nA1.65nA4.4nA30kV1.15nA1.8nA5.1nAFore-Scatterdetector(FSD)imageDuplexstee

4、lsampleFore-Scatterdetector(FSD)imageDuplexsteelsamplePatternoverlap(absoluteresolution)plarevonrtetaPattern1Noindexingpattern2P(effectivereslolution)DistanceCourtesyofIanBroughfromUMIST,ManchesterTwinBoundary150nmDistance(nm)Indexedpattern1TwinBoundary200nmDistance(

5、nm)Indexedpattern1TwinBoundary213nmDistance(nm)Indexedpattern1TwinBoundary220nmDistance(nm)NotIndexedTwinBoundary230nmDistance(nm)Indexedpattern2TwinBoundary250nmDistance(nm)Indexedpattern2TwinBoundary300nmDistance(nm)Indexedpattern2IndexedPattern1NotIndexedIndexedPa

6、ttern2Thenon-indexedpointsareinanarrowregionatthegrainboundary,wherethereareoverlappingpatterns.BandcontrastmapIndexedpointsinEulercolourssuperimposedonBandcontrastmap.Blackpointsarethenot-indexedpoints.HighresolutionEBSDOptimumoperatingconditionsofaSEMarecrucialinob

7、taininghighresolutions.Theimportantoperatingconditionsare;•Tiltangle•AcceleratingVoltage•ProbeCurrent•WorkingDistanceSpatialresolutionL=2.9LPACourtesyofIanBroughfromUMIST,Manchester30umapertureequivalentto0.81nA200Horizontalboundary150Verticalboundary10050Spatialreso

8、lution(nm)0EffectiveAbsolute120umapertureequivalentto3.82nAHorizontalboundaryVerticalboundaryHighresolutionEBSDOptimumoperatingcond