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1、IEEETRANSACTIONSONMICROWAVETHEORYANDTECHNIQUES,VOL.61,NO.7,JULY20132685Calibration-KitDesignforMillimeter-WaveSiliconIntegratedCircuitsDylanF.Williams,Fellow,IEEE,PhillipCorson,Member,IEEE,JahnaviSharma,StudentMember,IEEE,HarishKrishnaswamy,Member,IEEE,WeiTai,Member,IEEE,ZachariasGeorg
2、e,DavidRicketts,PaulWatson,EricDacquay,Member,IEEE,andSorinP.Voinigescu,SeniorMember,IEEEAbstract—Westudyandpresentdesignguidelinesforthru-re-Vector-network-analyzercalibrationsusedtocharacterizeflect-linevector-network-analyzercalibrationkitsusedforchar-silicontransistorsareusuallyperf
3、ormedoncommercialacterizingcircuitsandtransistorsfabricatedonsiliconintegratedimpedance-standardsubstratesfabricatedonanaluminasub-circuitsatmillimeter-wavefrequencies.Wecomparecontact-padstratewithashort-open-load-thru(SOLT),line-reflect-matchdesignsanddevelopfixed-fillcontactsthatachiev
4、ebothrepeat-ableandlowcontact-padcapacitances.Wedevelopafill-freeand(LRM)[1],line-reflect-reflect-match(LRRM)[2],orsimilarmesh-freetransmissionlinestructureforthecalibrationkitandcalibrationalgorithm.Thisfirsttiercalibrationmovesthecompareittosimilartransmissionlineswithmeshedgroundplane.c
5、alibrationreferenceplane“totheprobetips.”Thefirst-tierWealsodevelopagoldplatingprocessthatgreatlyimprovescon-probe-tipcalibrationisthenoftenfollowedbyasecond-tiertactrepeatability,permittingtheuseofredundantmultilinecali-calibrationintendedtomovethecalibrationreferenceplanebrations.This
6、inturnsimplifiesthedevelopmentofanerroranal-ysis.Finally,weapplythetechniquetostate-of-the-arttransistorfromtheprobetipstothetransistorterminals[3]–[5].Thesecharacterization,andpresentmeasuredresultswithuncertainties.secondtiercalibrationsareusedtosubtractouttheelectricalparasiticsassoc
7、iatedwithcontactpads,shorttransmissionlinesIndexTerms—Calibration,measurement,millimeterwave,scat-teringparameters,silicon,transistor,uncertainty,vectornetworkintheinterconnectstackseparatingthecontactpadsfromtheanalyzer.transistors,andaccessviasconnectingthosetransmissionlinestotran
