vhf—pecvd法氢化微晶硅薄膜的低温制备

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1、维普资讯http://www.cqvip.com第23卷第9期半导体学报Vo1．23．No．92002年9月CHINESEJOURNAIOFSEMIC()NDUCTORSSep．，2002FabricationofHydr0genatedMicrocrystallineSiliconThinFilmsatLowTemperaturebyVHF—PECVDYangHuid0ng，WuChunya，MaiYaohua，LiH0ngb0，XueJunming．LiYan．RenHuizhi，ZhangLizhu。，GengXinhuaandXi0ngSha0zh

2、en(1InstituteofPhotoelectromcs，NankaiUniversity，Tianfl'n300071，Chin)(2InstituteofThinFilmsandNanoMaterials，WuyiUniversity，Jiagme529020。Chid)(3TianjinSchoolofMechanicalandElectricalIndustry，rianji300071，Chid)Abstract：UsingHz—dilutedsilane，seriesofc—Si：Hfilmsarefabricatedatlowtemper

3、aturewithVHF—PECVD．Thethicknessmeasurementsrevealthatthedepositionratesareobviouslyenhancedwithhigherplasmaexcitationfrequencyorworkingpressure’butincreasefirstlyandthendecreasewiththeincreaseofplasmapowerdensitv．Ra—manspectrashowthatthecrystallinityandtheaveragegrainsizesofthefil

4、msstronglydePendonthetemDeratureofsubstrateandtheconcentrationofsilane．However，theplasmaexcitationfrequencyonlyhaseffectonthecrs—tallinity'andamaximumoccursduringthefurtherincreaseofplasmaexcitationfrequency．Fr。mXRDandTEMexperlments’threepreferentialcrystallineorientations(111)，(2

5、20)and(311)areobserved，andtheaveragegrainsizesaredifferentforeverycrystallineorientation．Keywords：tac—Si：Hthinfilms；VHF—PECVD；depositionrate；crystallinityPACC：7360F；7280N；8115HCLCnumber：TN304·055Documentcode：AArticleID：0253—4177(2002)09—0902—07Sincec—Si：Hhasanindirectbandgap，whenu

6、s1Introductioningasasolareellactivematerial，itsthicknessusu—allyshouldbemorethan2pmforsufficientabsorD—Inrecentyears，moreandmoreattentionshavetionofsunlightevenusingopticaltrappingtechbeenpaidtohydrogenatedmicrocrystallinesiliconnique．However，thedepositionrateof“c—Si：H(c—Si：H)film

7、depositedatlowtemperaturebefabricatedwithconventionalRFPECVDisgener-causeofitspromisingapplicationtostablehighef—allymuchlowerthanthatofhydrogenatedamor—ficiencysolarcells[引，andalargepotentia1tobephoussilicon(a—Si：H)．Inordertoincreasetheappliedtothinfilmtransistorsandcolorsen—depo

8、sitionrateofc—Si：H，techniquessuch