资源描述：
《基于mems微屏蔽传输线的移相器分析》由会员上传分享，免费在线阅读，更多相关内容在行业资料-天天文库。
1、ABSTRACTABSTRACTMicrowaveandMillmeterwavephaseshifteristhekeypartofphasedarrayinthecommunicationandradarapplication,includinganalogphaseshiftersanddigitalphaseshifters.Comparedwithanalogphaseshifter,thedigitalphaseshifteriseasytoadjust,andalsohasadvantageslikesmallpha
2、sedeviationandshortresponsetime.Duetothelargebulkandnarrowoperatingfrequency,digitalphaseshiftertakingMEMStechnologyisarisinggradually.Thisthesisresearchesanoveltransmissionline–MEMSmicroshieldtransmissionline,aimedattheoreticalanalysisandthreedimensionalfull-wavesimu
3、lation.WeanalyzedbasicoperationprincipleofdirectcontactRFMEMSSPDTswitches.EstablishmentofRLCcircuitmodeloftheswitchesisdoneandthecircuitparametersareextracted,ameasurementsystemofRFMEMSdirectcontactswitchesisthensetup.Finallya4-bitphaseshifterbasedonRFMEMSdirectcontac
4、tswitchesisdesigned,manufacturedandtested.Themaincontentofthethesisincludesthefollowing:1.TransmissioncharacteristicsofMicroshieldlinearestudied.Conformalmappingmethodisemployedtoanalyzemicroshieldlinequasi-statically,thenumericalcalculationandsimulationareusedtoanaly
5、zetransmissioncharacteristics,includingcharacteristicimpedanceandrelativepermittivity.Thecharacteristicimpedancehaswidevariationrangeandtherelativepermittivityapproachto1,whichisgoodfortransmission.Atlast,structureparameters(depthandwidth)ofmicroshieldlinecavityisanal
6、yzed,andinfluencebroughtbychangesoftheseparametersisinvestigated.2.BasicoperationprinciplesofRFMEMSSPDTswitchesarepresented.Accordingtoactualsizeandtestdata,RLCcircuitmodelofswitchesisestablishedandthecircuitparametersareextractedafterwards,completeRFMEMSSPDTswitchese
7、quivalentcircuitmodelishenceobtained.Fittingtheanalysisresultandtestdataofswitches,verifyingtheaccuracyandprecisionofcircuitmodel,theequivalentmodelissimulatedusingADS.FinallyameasurementsystemofRFMEMSdirectcontactswitchesisdesigned,wecantestswitchingspeed,S-parameter
8、,lifetime,etal.3.A4-bitphaseshifterbasedonRFMEMSSPDTswitchesisdesigned.Afterdeterminingthetopologicalstructure,sizeandshapeo
