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1、上海交通大学硕士学位论文摘要建了一种紧凑型MEMS开关线移相器，并且通过增加辅助驱动电极、悬空梁折叠结构等技术措施，有效降低了MEMS开关的驱动电压。采用CoventorWare，AnsoftHFSS有限元分析软件对上述静电驱动RFMEMS开关以及45°、90°和180°移相器进行了全面系统的仿真分析。结果表明，虽然叉指式共面波导有效地降低了移相器的片上面积，但是移相器具有较低的插入损耗和适当的隔离度，有效保持了MEMS移相器的关键技术优势。采用改良的UV-LIGA工艺，完成了45°、90°和180°移相
2、器样品的集成制造。相比于传统硅基底开关线型移相器，本文所研制的移相器的片上面积减小了约60%。经测试，新型RFMEMS移相器样品在10GHz中心频率的插入损耗为2.25dB，在整个X波段，回波损耗低于-21.1dB。移相器在10GHz中心频率时的相移误差小于7.6%。实验测试结果优于设计指标。关键词：紧凑型MEMS移相器，开关线型，叉指式共面波导，RFMEMS开关第II页万方数据上海交通大学硕士学位论文ABSTRACTStudyonX-bandRFMEMSSwitched-linePhaseShifter
3、ABSTRACTMicrowavephaseshiftershavebeenwidelyusedinmanyfieldssuchasinstrumentation,metrology,powercombiningandlinearamplifiers.Inparticular,themostprevalentuseofphaseshiftersisinscanningphased-arrayantennas.Eventhoughtheutilityofphased-arrayantennascontinu
4、estobeoccupiedbymilitaryradarandtrackingplatforms,manycommercialapplicationshaveemergedinthepastdecadeorso.Forexample,itcanbeemployedinlow-Earth-orbit(LEO)communicationssatelliteconstellationsandcollisionwarningradar,orinanaspectoftheIntelligentVehicleHig
5、hwaySystemorAutomatedHighwaySystem.Militaryphased-arrayradarhasbeenfacilitatedwithhighcostferritephaseshifters,whichholdaportionof40percentoftheoverallantennacost.Besidesferritephaseshifters,PINdiodeorFETbasedphaseshiftershavebeenwelldevelopedinthepastten
6、years.MicrowavephaseshifterswithMEMSswitcheshavemeritsoversolid-statedevicessuchasthehighcut-offfrequency,lowloss,smallvolume,etc.TheapplicationofMEMStechnologyinradiofrequencyfieldannoucedtheadventofanewresearchbranch-RFMEMS.RFMEMSdevicesarenotonlymuchsm
7、allerinsizeandeasiertobeintegratedthanconventionalones,buttheperformanceshavealsobeenenhanced.Comparedwithconventionalradiofrequencycomponents,RFMEMSdeviceshaveadvantagesofsmallsize,lowconsumption,lightweight,lowcost,etc.Ithasgoodcompatibilitywithstandard
8、integratedcircuitprocessing,whichmakesmonolithicintegrationpossible.MEMStechnologyhasprovidedaneffectivesolutionforwirelesscommunicationsystemtobeminiaturized,lowconsumptionandlowloss.第III页万方数据上海交通大学硕士学位论文ABSTRACTTh
