微区压印法制作微透镜阵列扩散片的研究

《微区压印法制作微透镜阵列扩散片的研究》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。

1、Thefabricationofmicrolensarraydiffuserusingmicro—·areaimprintmethodAbstractInrecentyears，theresearchofmicro-opticshasbeenveryactive，Microlensandthemicrolensarrays(MLAs)asaverytypicalandcommonmicro—opticaldevicehasarousedwidespreadinterests．MLAsisthebasisofminiatureand

2、integratedopticalsystems，andhasmanyimportantapplicationsinopticalcomputing，opticaldisplay,opticalinformationprocessingandopticalcommunications．MLAsfabricationmethodhasalsobeenin—depthstudy,therearemanymanufacturedtechniquessuchas：resistmeltingmethod，黟ayscalemask，hotbo

3、ssingmethod，sol—gelmethodandPhoto—inducedcrosslinkingpolymerization．Nano—imprintlithographyisagraduallydevelopedtechnologyinrecentyears．Witlltheadvantageofhighresolution，highefficiencyandlowcost。ithasknownas”oneofthetentechnologiesthatcouldchangetheworld”．Inthispaper,

4、wepresentsanewmicrolensarrayfabricationmethods—micro-areaimprintmethod．Micro—areaimprintthroughthesmallunitregion’Srepeatedimprinttoachievethecombinationoflargeformat，thepaperexpoundedanalysisthemicro·areaimprintprinciple，designandfabricatethemicro—areaimprintmachines

5、ystem．Detailsofthemicroimprintmachinesystemisproposed，includeditsstructures，operatingprinciplesandmajorcomponents’function．Usingmicro-areaimprintmachinesystemproducedmicrolensarray．Andalargenumberofexperimentsandexplanationsaremadeaboutthepreparationoftheimpressionmat

6、erial，thefabricationofimprinttemplatesandtheselectionofimprintparameters．AfterthefabricationofMLAs，Paperproposedanewtypeofopticaldiffuserwithcascadedmicrolensarrays(MLAs)．ThediffuseriscomposedofalayerofMLAswithsmallapertureandhi曲numericalaperture(NA)onoutputsideandala

7、yerofMLAsII微区压印法制作微透镜阵列扩散片研究英文摘要withlargeapertureandlowNAonincidentside．Theinfluenceoftheparameters(suchassagheight，apertureetc．)ofcascadedMLAsonthediffusingbehaviorisinvestigatedbyusingofraytracingmethod．Theresultsshowthatthemaximumluminanceincreases、析ththeratioofsag

8、heighttoapertureandanadditional3-5％opticalgainCanbeaccomplishedbyinsertinganotherlayerofMLAswitllaheight—apertureratioof0．01