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1、SpringerSeriesinMaterialsScience30EditedbyH.SakakiSpringerBerlinHeidelbergNew¥orkBarcelonaBudapestHongKongLondonMilanParisSantaClaraSingaporeTokyoSpringerSeriesinMaterialsScienceAdvisors:M.S.Dresselhaus·H.Kamimura·KA.MullerEditors:U.Gonser·R.M.Osgood,Jr..M.B
2、.Panish.H.SakakiManagingEditor:H.KV.Lotsch30ProcessTechnologyforSemiconductorLasersCrystalGrowthandMicroprocessesByK.IgaandS.Kinoshita31NanostructuresandQuantumEffectsByH.SakakiandH.NogeVolumes1-28arelistedattheendofthebook.KenichiIgaSusumuKinoshitaProcessTe
3、chnologyforSemiconductorLasersCrystalGrowthandMicroprocessesWith115Figuresand20TablesSpringerProfessorDr.KenichiIgaDr.SusumuKinoshitaTokyoInstituteofTechnologyPrecisionandIntelligenceLaboratory4259Nagatsuta,Midori-kuYokohama226,JapanSeriesEditors:Prof.Dr.U.G
4、onserM.B.Panish,Ph.D.Fachbereich12.1,Gebliude22/6AT&TBellLaboratoriesWerkstoffwissenschaften600MountainAvenueUniversitlitdesSaarlandesMurrayHill,NJ07974-2070,USAD-66041SaarbrUcken,GermanyProf.R.M.Osgood,Jr.Prof.H.SakakiMicroelectronicsScienceLaboratoryInstit
5、uteofIndustrialScienceDepartmentofElectricalEngineeringUniversityofTokyoColumbiaUniversity7-22-1Roppongi,Minato-kuSeeleyW.MuddBuildingTokyo106,JapanNewYork,NY10027,USAManagingEditor:Dr.-Ing.HelmutK.V.LatschSpringer-Verlag,Tiergartenstrasse17D-69121Heidelberg
6、,GermanyLibraryofCongressCataloging-in-PublicationDataIga.Ken-ichi,1940-Processtechnologyforsemjconductor1asers:crystaJgrowthandmicroprocessesIKenlch119a,SusumuKlnosh1ta.p.em.--(SpringerseriesInmaterialsscience)Includesbibliographlcalreferencesandindex.1.8em
7、iconductorlasers--Des1gnandconstruct1on.2.Lasermaterials.3.Crystalgrowth.4.Epitaxy.1.Kinoshita,Susumu.1959-II.Title.III.Series.TA1700.I491996621.36'6--dc2095-49999CIPISBN-13:978-3-642-79578-7e-ISBN-13:978-3-642-79576-3DOl:10.1007/978-3-642-79576-3Thisworkiss
8、ubjecttocopyright.Allrightsarereserved,whetherthewholeorpartofthematerialisconcerned,specificallytherightsoftranslation,reprinting,reuseofillustrations,recitation,broadcasting,reproductiononmicr