耦合腔半导体激光器分析-(6121)

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1、浙江大学硕士学位论文浙江大学硕士学位论文AbstractWiththerapiddevelopmentofinformationtechnology,thetransmissionspeedoftraditionalopticalcommunicationnetworksfacegreatchallenges．Manynovelsemiconductorlasersinordertomeettheeverincreasingdemand．Forinstance，wavelengthswitchablelasersareofgreatuseinmultiplexings

2、ystems，andnarrowlinewidthlasersmakecoherentcommunicationsuchasmultiple-phaseshiftkeying(MPSK)．Inthisthesis，wereportsomecoupledcavitylaserswithnovelstructures．suchasV-coupledcavitylasersandseries—coupledcavitylasers．Intheanalysisofthelaseroperation，weusemethodofline(MOL)torectifytheresul

3、toftheoriginaltransfermatrixmethod(TMM)，andtooptimizethedevicedesigns．Wehavedesignedtwotypesofseries-coupledcavitylaser，andreportthefabricationprocessindetail．Themeasurementresultsarethenpresented．ThesinglemodecoupledcavitylasershowsagoodperformancewithaSMSRmorethan40dBandanarrowlinewid

4、thassmallas120kHz．Thewavelengthswitchablecoupledcavitylaserisabletogenerate8channelswithSMSRmorethan30dB．Thesetwotypesofcoupledcavitylasermayhavepotentialapplicationsinmodemopticalcommunicationsystems．Keywords：coupledcavitylaser,deepetchedWench，singlemode，narrowlinewidth，laserarray,wave

5、lengthswitchableV浙江大学硕士学位论文V浙江大学硕士学位论文目录致谢⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．I摘要⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．．1IIAbstract⋯⋯⋯⋯。⋯．⋯⋯⋯⋯⋯⋯．⋯⋯⋯⋯⋯．⋯⋯⋯⋯⋯⋯．⋯⋯．．⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯V目录⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯vII第一章绪论⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯一11．1半导体激光器的历史发展⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯

6、一11．2半导体激光器的在光通信系统中的应用⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．．41．3论文的研究内容与主要创新点⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯10第二章耦合腔激光器的理论分析⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯112．I半导体发光原理⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯112．2耦合腔激光器波长调谐原理⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯132．3￥形耦合腔激光器介绍⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．i52．4串联耦合腔激光器的理论分析⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯19第三章耦合腔激光器的制作⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．273．1半导体激光器制

7、作工艺介绍⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯273．2刻蚀槽激光器制作流程⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯34第四章耦合腔激光器实验测量⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯424．1单电极多段串联耦合腔激光器功率与光谱测试⋯⋯⋯⋯⋯⋯⋯⋯⋯424．2单电极多段串联耦合腔激光器线宽测试⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯464．3双电极可调谐串联耦合腔激光器调谐性能测试⋯⋯⋯⋯⋯⋯⋯⋯⋯48第五章总结⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯535．1论文工作创新点总结⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯535．2后续工作⋯⋯⋯⋯⋯⋯⋯