微波氢等离子体发射光谱诊断

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1、武汉T程大学硕十学位论文SiClx基团，随后H原子与SiClx基团发生链式反应生成HCl和Si等最终产物。发现氢气的加入能增jJISiCl4的分解率，在微波功率为800W时，H0【线发射光谱的强度和SiCl4的分解率都随SiCl4初始浓度的增加而减小，当SiCl4浓度小于1％时，其分解率能维持在95％以上。测量了喷嘴上方等离子体射流轴向上的激发态氢原子的空间分布，结果表明射流中心的氢原子密度要大于两端处的氢原子密度。关键词：氢等离子体；发射光谱；微波放电；展宽；诊断IIAbstractHydrogenplasmagenerallygeneratedbyDC，RFan

2、dmicrowavehasnumerouspotentialapplicationsinplasmachemicalvapordeposition，plasmareactionkinetics，chemicalsynthesisandotherresearchwork．Insitu，nonintrusivediagnosisofhydrogenplasmaareoftenthekeytOunderstandingthephysical-chemicalprocessesintheplasmaandcontrollingtheplasmabehavior．Inthis

3、paper,plasmaparametersandinterrelatedplasmareactionprocessintwokindsofhydrogenmicrowavedischargessystemhavebeenmeasuredbyatomicemissionspectroscopy．(1)TheHBalmeremissionlineshavebeenmeasuredonahigh-pressure(10-40kPa)microwavedischargesusingpurehydrogen．Thelinestrength，thelineprofilesan

4、dthelinewidthofHatomBalmerlines(战，Hp，H)havebeenstudied．Theinfluenceofthemicrowavepowerandworkingpressureontheelectronicexcitationtemperature，electrondensity,electricfieldstrengthandiontemperaturewereinvestigateddetailedly．Theresultsindicatethat：TheprofileofHatomiclinesisinaccordwithVoi

5、gtprofilesintheory．Thelinewidthof心，Hp，andHlinesincreasesinturn．Therelativeintensityofspectrallines，theelectrondensityandtheelectricfieldincreasewiththeincreaseofmicrowavepower,andincreasegraduallytoapeakvalueandthendecreaseswiththeincreaseofpressure，andallreachthemaximumatapressureof25

6、kPawhenthemicrowavepowerwassetat800W．Theelectronicexcitationtemperaturecontinuouslyreducedwiththeincreaseofpressureandthechangesofpressurehavelittleeffectoniontemperature．Withthemicrowavepowerincrease，theelectronicexcitationtemperatureandiontemperatureincreasewithadifferentextent．(2)Am

7、icrowaveplasmajetdevicehasbeendesignedtoexciteandIII武汉T程大学硕+学位论文maintainstableplasmaonatmosphericpress．TheemissionspectraofSiCl4／H2mixedgasdischargewereinvestigated．TheprocessandproductsofSICl4decompositionareanalysed．TheemissionintensityofHalineandthedecompositionefficiencyofSICl4at