应用于射频集成电路的硅基螺旋电感分析

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1、北京工业大学+r学硕士学位论文U———————————————————————————————————————————————————————————————————————————————————————————————————————————————————～——AbstractWiththedevelopmentofcommunlcationinduSt巧andsiliconfabricationtechnoIogies，咖dyofCMOSmdiof．requencyintegratedcircuit(RFIC)h鹊becomeho

2、t．Tlhesilicon．basedspiralinductorSaLsthekeyp嬲sivedeVicesofRF【CshavemanyadVantages，such嬲lownoise，lowpowerandsmaIlsizecomparedwiththeconVentionaldiscrcteinductors．Therefore，RFmoduIes，such邪thevoltagecon仃Dlledoscillator(VCO)，theIownoiseamplifier(LNA)，andpoweramplifier(1≥A)haV

3、eintenserequirementforthem．However，thequalityfactoroftheinductorSisIimitedbythesiliconsubstratelosses．Thispaperfocusesonthef．acto体influencingthepe响rmanceofinductorsbymeansofthefiniteelementelectromagneticanaIysis．Onthebasis，anoVelStructurcofinductorforuItrawidebandRfICsis

4、proposed．Themainworl(canbesummarizedasf．ollows：Firstly，thebasictheory，thepe—’ormancepammetersandthelossmechanismsofpIanarspiralinductorsonsiliconareintroducedindetail．Theefrectoftlleshape，geometrysizeandmaterialparametersontheinductorperfomlaIlceisinveStigated．Also，theea'

5、ectofthesubstrateconductivity，tIlematcrialparameterS锄dthethicknessoftheisolationlayerarepresented．Asabriefsummary，severaIs仃ategiesfortheinductorSdesignaregiven．SecondIy’inordertoreducethelosses，anoptimizationstructurcofco订withVariationwidthandspacearepresented．Asthemagnet

6、icfieldintensityofaspiralinductorincreasesgradualIyf硒moutsidetoinside，anarrowmetalStripwidthandwidemetalstripspaceareexpectcdtodecreasethemagneticfieldinducedIossesandreducetheproximi妙ea’ectintheinnercoil．Meanwhileawidemetalstripwidthandnarrowmetalstripspacearcexpectedtod

7、ecreaseohmicIosses锄dsavechiparea．Thirdly，t0reduc9thesubstmteIossesandenhancethepe渤mlanceofspiraIinductor，patteredgroundshield(PGS)insertedbetweenco．1andsiliconsubstrateisadopted．Thelossesofsubstratearemainlyduetomesubstra伧eddycurrentinducedbycurrentincoil．nerefore，thePGSi

8、spa他medwithslotSo劬ogonalt0thespimlthatconsistSofmuItifingerpoly—gateispresented．Theslotsactas粕op