tio-%2c2-薄膜的制备及其特性研究

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1、兰州大学硕士学位论文摘要TiO。薄膜具有优异的光催化和光诱导超亲水特性，在光催化降解有机物、染料敏化太阳能电池以及防雾、自清洁等领域有着广阔的应用前景。本文采用反应磁控溅射法成功地制备了Ti02薄膜样品，研究了沉积条件对薄膜结构特性的影响，得到了反应磁控溅射法沉积Ti02薄膜的最佳沉积条件。同时分析了薄膜的光学和亲水特性。研究发现，反应磁控溅射法制备TiO：薄膜时，衬底温度、混合气体中氧气分压比以及溅射工作气压等沉积条件对样品的结构特性有很大的影响。通过x射线衍射谱和AFM表面形貌图的测试，分析了不同沉积条件下样品

2、的结构特征。分析结果表明，采用反应磁控溅射法制备TiO：薄膜的最佳沉积条件是衬底温度400"C、混合气体中氧气分压比25％、溅射工作气压O．30Pa。通过紫外一可见分光光度计测量了薄膜的紫外一可见透射谱。实验发现，溅射沉积的TiO：薄膜对紫外线有很强的吸收能力。由于量子尺寸效应，光谱的吸收边发生“蓝移”，光学带隙变大。对水在TiO。薄膜表面的接触角的测量发现，薄膜表面粗糙度增加，降低了薄膜对水的接触角，有利于其亲水性能。紫外光照下薄膜的接触角迅速降低，光照120分钟后，薄膜的接触角接近零度，表现出超亲水性。兰型奎堂

3、堡主堂垡堡苎一一——————————』堕!LAbstractBecauseoftheexcellentphotocatalysisandphotoinductionsuperhydrophilia，titaniumdioxidehasbecomeakindofpromisingmaterialsinfieldsofpholodegradeorganicmolecules，dc—sensitizedsolarcells，antifoggingandself-cleaning．Inthisdissertation,Ti

4、02filmsweresuccessfullypreparedbyreactivemagneticsputtering．WeinvestigatedtheinfluencesofdepositionconditionsonthestructuralpropertiesofTi02filmsandfoundtheoptimalconditionsforthedepositionofTi02filmsbyreactivemagneticspmtering．Wealsostudiedtheopticalandhydrop

5、hiliapropertiesofthefilms．ItisfoundthatthestructuralpropertiesofTi02filmspreparedbyreactivemagneticspuRefingwerestronglyinfluencedbydepositionconditionsincludingsubstratetemperature，theratioofOztoArinmixedgas，andsputteringpressure．Thestructuresofsamplesdeposim

6、datdifferentconditionswerecharacterizedbyX-raydiffraction(ⅪtD)andatomicforcemicmscope(AFM)．TheresultsindicatedthattheoptimalconditionsforthedepositionofTi02filmsareasfollows：substratetemperatureof400℃,theratioof02to船of25％．andsputteringpressureof0，30Pa．UV-Vistr

7、ansmissionspectraofthefilmswere：studiedbytheUV-V／sspectrometer．ItfoundthatTi02filmspreparedbysputteringcangreatlyabsorbingultravioletlight．TheabsorptionedgeofUV·Visspectrawasblue—shiftandopticalbandgapbecamewidenbecauseofquantumcomqnementeffect．Theresultsofmea

8、surementsaboutthewatercontactangleollthesurfaceofthefilmindicatedthatthewatercontactangledecreasedwiththesurfaceroughnessofthefilmincreased，itimprovedthehydrophiliaofthefdm．Thewate