冷壁化学气相沉积法制备纳米碳管

冷壁化学气相沉积法制备纳米碳管

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1、西北工业大学硕士学位论文摘要AbstractBecauseofuniquemolecularstructureandproperties,suchashighaspectratio,largesurfacearea,remarkablemechanicalstrength,carbonnanotuhes(CNTs)hasbeenpaidwideattentionto.Thispaperdescribedbrieflyitspreparationmethods,growthmechanismsandpotentialapplications.The

2、growthofCNTsusingCVDwasconductedinthecool-wallheatingovenonthreesubstrates(monocrystallinesilicon,iron,graphite),twocatalysts(iron,nickle),twocatalystthickness(20nm,80nm),threedilutedgases(ammonia,hydrogen,nitrogen),threefluxratio(2/1,10/1,19/1),under700'Cand8500C,respectivel

3、y.SEMandTEMwereusedtoinvestigatethegrowthbehaviorsasafunctionofthecatalyst,substrate,growthtemperatureanddilutedgas.Themainresearchfindingswereasfollows:NickelhadahighercatalysisthanironinthegrowthofCNTs,andthethicknessofcatalystaffectedthediameterofCNTs.Comparedgraphiteandir

4、on,whenmonocrystallinesiliconwasusedasthesubstrate,CNTshadahigherpurity.Theinvolvedreasonwasthatmonocrystallinesiliconhadahighersmoothanduniformsurface.Thefluxratioofdilutedgaseswasholdas10/1,whichcouldresolvethecontradictionoftheasynchronismbetweentheproductandgrowthoftheato

5、miccarbon.ThedegreeofgraphitizationanddiameterofCNTsincreasedwithelevatedtemperature,whichshowedthathightemperatureimprovedthecatalysisofcatalyst,andwasatributedtouniformarrangementofatomiccarbon,andhinderedamorphouscarbon.AmmoniaplayedacriticalroleintheverticalalignmentofCNT

6、s,andthepossiblereasonwasthatin850Ctheatomichydrogendecomposedfromammoniareactedwithamorphouscarbontoformvolatileproductstokeepthemetalsurfaceclean,andmechanicalleaningagainstneighboringtubesestablishedamorphologyofverticalalignment.ThegrowthprocessofCNTsusingCVDwaspossiblyfo

7、llowedasthebased-growthmechanism.Theatomiccarbonprecipitatingfromthetopofthecatalystsgrew西北工业大学硕士学位论文摘要upward,butthecatalystsstillexistedinthebottomofCNTsduetothestrongadhesionbetweencatalystsandsubstrate.Keywords:Cool-wallCVD;CNTs;Catalyst;Substrate;Temperature;Dilutedgas;Fl

8、uxratio;Verticalalignment;Growthmechanism西北丁业大学硕L学位论文第一章绪论第一章绪论1991年

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