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ID:32384556
大小:5.29 MB
页数:5页
时间:2019-02-04
《微纳米三坐标测量机的高精度恒温箱研制》由会员上传分享,免费在线阅读,更多相关内容在工程资料-天天文库。
1、第36卷第5期计量学报Vol.36,№52015年9月ACTAMETROLOGICASINICASeptember,2015doi:10.3969/j.issn.10001158.2015.05.02微纳米三坐标测量机的高精度恒温箱研制1111,2冯建,李瑞君,何亚雄,范光照(1合肥工业大学仪器科学与光电工程学院,安徽合肥230009;2台湾大学机械工程学系,台北10617)摘要:针对恒温室控制精度低和分离式恒温箱因振动而无法满足微纳米三坐标测量机需要的问题,研制了一套自然对流式高精度恒温箱。用定制尺寸的中空亚克力板和轻便型超低导热系数真空绝热板制成
2、绝热箱体。以仪器测量点温度作为温度控制反馈值,均匀位于恒温箱顶部的9个半导体制冷片对其周围空气进行制冷,箱内冷空气均匀向下流动,与向上流动的热空气进行热交换。采用LabVIEW与MATLAB混合编写高精度温控程序。实验结果表明:设定值为20℃时的稳态误差为00032℃,稳态时温度波动小于003℃,优于一级恒温室。新型恒温箱具有成本低、能耗小和无振动干扰等优点。关键词:计量学;微纳米三坐标测量机;恒温箱;半导体制冷片;真空绝热板;自然对流中图分类号:TB92文献标识码:A文章编号:10001158(2015)05045505Developmento
3、faHighPrecisionConstanttemperatureChamberforMicronanometricCMM1111,2FENGJian,LIRuijun,HEYaxiong,FANKuangchao(1SchoolofInstrSci&OptoelectricEngineering,HefeiUniversityofTechnology,Hefei,Anhui230009,China;2DepartmentofMechanicalEngineering,TaiwanUniversity,Taipei10617,China)
4、Abstract:Thespaciousconstanttemperatureroomandtheseparatedconstanttemperaturechamberscan’tmeettherequirementofmicronanometricCMMbecauseoflowprecisionandvibrationseperatelyAhighprecisionconstanttemperaturechamberbasedonthenaturalconvectionprincipleisdevelopedThewallsofthecust
5、omdesignedchamberismadeofhollowacrylicuponwhichalightweightthinvacuuminsulationplatewithultralowthermalconductivitycoefficientisadheredThetemperaturevalueoftheinstrumentmeasuringpointistakenasthefeedbacksignalNinethermoelectriccoolersusedtocooltheairinsidethechamberarearranged
6、ontheceilingofthechamberuniformlyThedownflowingcoolairandtheupflowinghotairformsnaturalconvectionTheprogramofthehighaccuracytemperaturecontrolledsystemisdevelopedusingLabVIEWandMATLABsoftwareTheexperimentalresultsshowthatthesystemsteadystateerroris00032℃onaverage,andthevaria
7、tionrangeislessthan003℃whenthesettemperatureis20℃ItissuperiortoaClassIstandardroomThenewtypeconstanttemperaturechamberhastheadvantagesoflowcost,lowenergyconsumptionandnovibrationKeywords:metrology;micronanometricCMM;constanttemperaturechamber;thermoelectriccooler;vacuuminsu
8、lationpanel;naturalconvectionprin
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