微纳米三坐标测量机驱动与控制系统的研究.pdf

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1、DevelopmentofaDrivingandControlSystemofMicro．nanoCMMHuangQiangxian,GongErmin,HanBin,ZhangWeifu．XuCongyu(SchoolofInstrumentScienceandOpto-electronicEngineering，HefeiUniversityofTechnology,HeFei230009)Abstract：InthisP叩er，theconstructionofadrivingSystemofMicro-nanoCMMisdescribed．Micro-nanoCMMi

2、saverycomplexmeasuringsyst锄，whichcontainscomplexmechanicalstructures．precisesignalprocessing，probesystemanddrivingsystem，andothersubsystemsandmodules．Anovelprobe，inthissystem，basedontheprincipleofDVDpickup。isdesignedforthree．dimensionalmeasurementandpositioning．啊1reepiezoelectriclinearmotor

3、sareusedastheactuatorsoftheMicro-nanoCMM．ThemechanicalstructureofworkingstagehereismadespeciallyinordertoaviodAbbeerrors。Laserfeedbackinterferometer,anewtypeofdisplacementsensor,basedonthefeedbackeffectisusedaspositionmeasuringunit．AnewdrivingandcontrollingstrategyofMicro-nanoCMMisproposed,

4、andcanbeusedtoachievethefastandprecisedrivingoflargetravelwithnanometerresolution．ThestrokesofX，Y，Zare50mm×50mm×50mill．The砸vings)rstemcanachieveunilateralrapidandstableapproachtoanuncertaindistance，andeffectivelypreventtheovershoot．Andinonedimension．thepositioningfluctuationsofdifferentdist

5、ancecanbelimitedin4-4minanalogymodeofthepiezoelectriclinearmotor．Accordingtothetestresults，thedrivingandcontrolsystemissuitableformeMicro-nanoCMM．Keywords：precisioninstrumentandmachinery；micro-nanoCMM；piezoelectriclinearmotor；一feedbackc∞仃ol0Intl"oductionMicro-nanoCoordihateMeasuringMachine(

6、Micro-nanoCMM)isanecessarytooltomeasurethedimensionsofmicro-mechanicalparts，suchasMEMSparts，micro-gear，etc．Now，severaltypesofMicro-nanoC姗arebeingdevelopedbyfamousinstitutesanduniversities．suchasTechnicalUniversityofIlmenauinGermany，PTBinGermany，NPLinEngland,NISTinAmerica．etc．SincetheMicro-n

7、anoCMMsneedthemeasuringaccuracyintheorderofhundrednano-meter，everypartintheMicro—llanoCMMshouldbedesignedcarefully．Thedrivingsystem，asoneoftheimportantpartsoftheMicro-nanoCMM，hassomespecialrequirements，suchasnano-scaleresolution,lowheat．10wvibrationandhi