应用于光子集成的硅基混合集成人工微结构硅波导输出激光器研究

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1、激光与光电子学进展51,110007(2014)Laser&OptoelectronicsProgress©2014《中国激光》杂志社应用于光子集成的硅基混合集成人工微结构硅波导输出激光器研究*王海玲张冶金冯朋渠红伟郑婉华中国科学院半导体研究所集成光电子国家重点联合实验室,北京100083摘要目前，硅光子集成在光通信和信号处理、微电子系统的片内和片间互连领域成为研究热点。虽然其基础元件如波导、输入/输出(I/O)耦合器、波分复用器、调制器和光探测器性能达到了一定水平，但是硅光子集成回路仍面临挑战，原因是硅基激光光源的制作仍然是一个技术难题。综述了近年来硅基混合集

2、成激光器的进展，介绍了课题组的研究成果。将微结构引入到硅基混合集成硅波导输出激光器中,提出了新型的III-V/硅混合集成的微结构硅波导输出单模激光器。此新型激光器工作在通信波段。其中，InGaAlAs增益结构是通过晶片直接键合的方式与具有微结构的SOI（Si/SiO2/Si）集成。激光器模式选择机制是基于SOI中的周期微结构，仅通过标准光刻即可实现。微结构激光器室温连续输出为0.85mW，脉冲输出为3.5mW，边模抑制比为25dB。关键词激光器；微结构；混合集成；单模激光器；边模抑制比中图分类号O436文献标识码Adoi:10.3788/LOP51.110007

3、InvestigationontheSi-BasedHybridIntegratedMicro-StructuredLaserwithSiliconWaveguideOutputforSiliconPhotonicIntegrationWangHailingZhangYejinFengPengQuHongweiZhengWanhuaStateKeyLaboratoryonIntegratedOptoelectronics,InstituteofSemiconductors,ChineseAcademyofSciences,Beijing100083,ChinaA

4、bstractSiliconphotonicintegrationhasgeneratedanoutstandinginterestforopticaltelecommunications,signalprocessingandforinterandintra-chipinterconnectsinmicroelectronicsystems.Thedevelopmentofbasicbuildingblockssuchaswaveguides,input/output(I/O)couplers,wave-divisionmultiplexers,modulat

5、orsandphotodetectorshasreachedsuchaperformancelevel,thesiliconphotonicsintegratedcircuitisnowconsideredasanemergingchallengeintheresearcharea,becausethesilicon-basedlaseristhetechnicaldifficulty.TheprogressofthehybridintegratedIII-V/Silasersinrecentyearsisreviewed,thenourrecentworkon

6、thehybridintegratedIII-V/Silasersisreported.AnovelIII–V/siliconhybridsingle-modelaserisdesignedandfabricatedbyaddingthemicro-structureintothehybridintegratedsiliconlaser.ThelaseroperatesatCband,andtheAlGaInAsgainstructureisbondedontoapatternedsilicon-oninsulatorwafer(Si/SiO2/Si)direc

7、tly.Thenovelmodeselectionmechanismbasedonaperiodicmicro-structuredsiliconwaveguideisapplied.Atroomtemperature,0.85mWand3.5mWoutputpowerincontinuous-waveandpulse-waveregimesisobtained,respectively.Theside-modesuppressionratioof25dBisobtainedfromtheexperiments.Keywordslasers;micro-stru

8、cture;hybrid