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1、ABSTRACTABSTRACTInsemiconductormanufacturingarea,almostallthemanufacturedtoolsareverycomplex.Themorecomplexthetoolis,themoretoolparameters/recipefilesareneededtobesetup.Ifsomeonemodifiedtherecipe,setthekeyparametertoawrongvalue,itwilldirectlyimpactproductquality.Besidethis,mostthetool
2、swillnotonlydedicateforoneproduct,anddifferentproducthasitsownrecipe.Ifoperatorchoosesawrongrecipe,there’snoconfidencetogarenteeproductquality.Ifwecancreateasystemtostorealltherecipes,onlyauthorizedpersoncanvisitthissystemandchangethesystemdatabase,thenwecanreducetheriskforrecipewasch
3、angedbyun-authorizedperson.Atthesametime,ifthesystemcanautomaticallydownloadtherightrecipetorighttool,nomanualsectionisneeded,wecanreducewrongrecipewaschosenbycarelessoperation,eventheoperationtimeisreduced,operationprocessissimplied.Thisdissertationstartsfromsoftwareengineeringresear
4、chingmethod,studiesthecurrentsituationoftheequipmentsautomaticcontrol,generatesamodelandcomeoutthesolutionthroughbelowthreekeyindicators:Firstly,performtoolandautomaticcontrolsystemrealtimecommunicationandremotecontrol.Toachievetheidealstatus,wemustsetupanetworkconnectionplanandaspeci
5、alcontrolsystem.Thenallthetools’recipescanbemanagedbyasinglesystem.Secondly,optimizethefunctionfortheautomaticcontrolsystem.Thissystemcanidentifythecurrentrunningtoolscorrectly.Besidethis,thesystemcanreceivetheinstructionforotherautomaticcontrolsystem,distributeanddownloadrelatedrecip
6、etotool.Alloftheseprocedurescanbedoneautomatically,anditwillnotimpacttoolnormalrunningstatuswithminimizedwaitingtime.Thirdly,performdataandusermanagementandfortheautomaticcontrolsystem.Onlyauthorizedpersoncanvisitandmodifythedatabase.Atthesametime,usercanchoosedifferentmenusbasedonthe
7、irrequirement.Asaresult,whilebuildingupthemodeling,demothistheoryinaworldwidesemiconductormanufacturingcompany.Withconsolidationofthetheoryandpractice,II万方数据ABSTRACTthismodelscientificallysolvestheproblems,successfullyachievedanautomaticcontrolsystempurpose.Keywords:SoftwareEngineerin
8、g,sem
