高频用nizn铁氧体薄膜的结构与磁性毕业论

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1、郭党委兰州人学博上学位论文AbstractRecently'duetotheongoingtrendforminiaturizationandsteadilyincreasingoperatingfrequenciesintothegigahertzrangeofelectronicdevices，Ni—Znferritefilmswithhighresonancefrequency,largeresistivity,excellentwearresistance，andstablechemicalpropenyhavebeeninattention

2、extensively．Inthisthesis，theNi-ZnferritepowershavebeenpreparedbychemicalCO—precipitationmethodfirstly．Andthentheywerepressedandsinteredintothetargets，whichwereusedinthesputteringprocession．TheNi-ZnferritefilmsweredepositedontoSi(111)substratesbyradiofrequency(RF)magnetronsputte

3、ring．Thestructural，morphologicalandmagneticpropertieswereinvestigatedsystematicallybytheX-raydiffraction，fieldemissionscanningelectronmicroscope，vibratingsamplemagnetometer,andvectornetworkanalyzer．Themainresultswereasfollows：1．Wehaverealizedins／tufabricatedwell—definedNi-Znfer

4、ritefilmsbysputteringwithoutanyheatingtreatments，andtheyhadbettersoftmagneticproperty．ThesaturationmagnetizationoftheNio．452110．55Fe204filmwith300amwasabout237．2emu／cm’，whichwasmuchlargerthanthatofotherfilms／nsitudepositedwithoutheatedinthereports．2．Theresonancefrequency(Dofthe

5、Ni-ZnferritefilmsdepositedbymagnetronsputteringhasbeenintheGHzrange，whichWasmuchhigherthanthecorrespondingferritebulksandexceedingSnoek’SlimitforNi-Znferritebulk．Andthereasonwhytheferritefilmshavehi【gh石hasbeenexplainedbymakinguseofthebianisotropymodel．3．TheZnFe204filmsdeposited

6、bymagnetronspuaeringwithoutanyheatingtreatmentsweresingle-phasewithspinelstructureandhadstrongferromagneticpropertyatroomtemperature．TheeffectofthermalannealingonstructuralandmagneticpropertieshasbeeninvestigatedforZnFe204films．ItwasfoundthatthemagneticpropertyofZnFe204filmsann

7、ealedatrelativelylowtemperatureof200℃Wasthemostexcellent．Ithadlargesaturationmagnetization，highresonancefrequency，largepermeabilityandbetternoisesuppressionproperty．TheresonancemechanismoftheZnFe204filmshasbeeninvestigated，anditwasconsideredthattheresonancemodelwasthenaturereso

8、nance．4．【FeMn／Ni—Znferrite】layeredcompositefilmshavebe