高频用nizn铁氧体薄膜的结构与磁性

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1、郭党委兰州人学博上学位论文AbstractRecently'duetotheongoingtrendforminiaturizationandsteadilyincreasingoperatingfrequenciesintothegigahertzrangeofelectronicdevices，Ni—Znferritefilmswithhighresonancefrequency,largeresistivity,excellentwearresistance，andstablechemicalpropenyhave

2、beeninattentionextensively．Inthisthesis，theNi-ZnferritepowershavebeenpreparedbychemicalCO—precipitationmethodfirstly．Andthentheywerepressedandsinteredintothetargets，whichwereusedinthesputteringprocession．TheNi-ZnferritefilmsweredepositedontoSi(111)substratesbyrad

3、iofrequency(RF)magnetronsputtering．Thestructural，morphologicalandmagneticpropertieswereinvestigatedsystematicallybytheX-raydiffraction，fieldemissionscanningelectronmicroscope，vibratingsamplemagnetometer,andvectornetworkanalyzer．Themainresultswereasfollows：1．Wehav

4、erealizedins／tufabricatedwell—definedNi-Znferritefilmsbysputteringwithoutanyheatingtreatments，andtheyhadbettersoftmagneticproperty．ThesaturationmagnetizationoftheNio．452110．55Fe204filmwith300amwasabout237．2emu／cm’，whichwasmuchlargerthanthatofotherfilms／nsitudepos

5、itedwithoutheatedinthereports．2．Theresonancefrequency(DoftheNi-ZnferritefilmsdepositedbymagnetronsputteringhasbeenintheGHzrange，whichWasmuchhigherthanthecorrespondingferritebulksandexceedingSnoek’SlimitforNi-Znferritebulk．Andthereasonwhytheferritefilmshavehi【gh石h

6、asbeenexplainedbymakinguseofthebianisotropymodel．3．TheZnFe204filmsdepositedbymagnetronspuaeringwithoutanyheatingtreatmentsweresingle-phasewithspinelstructureandhadstrongferromagneticpropertyatroomtemperature．Theeffectofthermalannealingonstructuralandmagneticprope

7、rtieshasbeeninvestigatedforZnFe204films．ItwasfoundthatthemagneticpropertyofZnFe204filmsannealedatrelativelylowtemperatureof200℃Wasthemostexcellent．Ithadlargesaturationmagnetization，highresonancefrequency，largepermeabilityandbetternoisesuppressionproperty．Thereson

8、ancemechanismoftheZnFe204filmshasbeeninvestigated，anditwasconsideredthattheresonancemodelwasthenatureresonance．4．【FeMn／Ni—Znferrite】layeredcompositefilmshavebe