P12异常报错处理(下).docx

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1、A2353WAFERSHOULDBEONCASSETTESLOTMEASUREAftermovingthearmtoitshomeposition,tryagain.3.Message3.消息3.1StageMessage3.1阶段的信息3.1.1StageMessage3.1.1Stage消息M0001STAGEINITIALIZATIONNOTEXECUTEDM0001STAGE初始化不执行M0002XYSTAGETRANSFERDESTINATIONEXCEEDSSOFTWARELIMITM00

2、02XY阶段转移目的地超过软件限制M0003ZSTAGETRANSFERDESTINATIONEXCEEDSSOFTWARELIMITM0003Z阶段转移目的地超过软件限制M0004θSTAGETRANSFERDESTINATIONEXCEEDSSOFTWARELIMITM0004θ阶段转移目的地超过软件限制M0005UNABLETOFINDSEARCHPATTERNM0005UNABLE找到搜索模式M0006PROCEEDPOINTISNOTCORRECTM0006PROCEED观点是不正确的M00

3、07ARITHMETICERRORM0007ARITHMETIC错误M0008MARKERNOTCONNECTEDM0008MARKER没有连接M0009BRIDGEWILLINTERFEREWITHTARGETMOVEMENTM0009BRIDGE将干扰目标运动M0010COMMANDPARAMETERSEXCEEDLIMITM0010COMMAND参数超过限制M0011NOFILENAMEISSPECIFIEDM0011NO指定文件名M0012BRIDGEMOVEMENTNOTPOSSIBLEBE

4、CAUSEOF3PINISUPM0012BRIDGE运动不可能因为3针M0013BRIDGEWILLINTERFEREWITHCHUCKTOPM0013BRIDGE将干扰卡盘M0014BRIDGEWILLINTERFEREWITHTARGETM0014BRIDGE将干扰目标M0015BRIDGEWILLINTERFEREWITHPROBEPOLISHERM0015BRIDGE将干扰探测器抛光机M0016PROBEPOLISHERWILLINTERFEREWITHBRIDGEM0016PROBE抛光机将

5、干扰桥M0017PROBEPOLISHERWILLINTERFEREWITHPROBECARDM0017PROBE抛光机将干扰探针卡M0018BRIDGEWILLINTERFEREWITHCHUCKTOPDURINGZMOVEMENTM0018BRIDGE将在Z运动干扰卡盘上M0019BRIDGEWILLINTERFEREWITHTARGETDURINGZMOVEMENT在Z运动M0019BRIDGE将干扰目标M0020POLISHERWILLINTERFEREWITHBRIDGEDURINGZMOV

6、EMENTM0020POLISHER将在Z运动干扰桥M0021PROBECARDWILLINTERFEREWITHWAFERDURINGZMOVEMENTM0021PROBE卡将在Z运动干扰晶片M0022PROBECARDWILLINTERFEREWITHPOLISHERDURINGZMOVEMENTM0022PROBE卡将在Z运动干扰抛光机M0023CHUCKWILLINTERFEREWITHUPPERARMDURINGZMOVEMENTM0023CHUCK将在Z运动干扰上臂M0024CHUCKWI

7、LLINTERFEREWITHLOWERARMDURINGZMOVEMENTM0024CHUCK将在Z运动干扰下臂M0025SURFACEMAPNOTCOMPLETEDM0025SURFACE地图没有完成M0026WAFERMACRO-ALIGNMENTNOTCOMPLETEDM0026WAFERMACRO-ALIGNMENT没有完成M0027WAFERMICRO-ALIGNMENTNOTCOMPLETEDM0027WAFERMICRO-ALIGNMENT没有完成M0028PADREGISTRATIO

8、NOVERLIMITM0028PAD登记超过限制M0029INSPECTIONPADREGISTRATIONOVERLIMITM0029INSPECTION垫登记超过限制M0030THISPADNAMEHASALREADYBEENUSEDM0030THIS垫名称已被使用M0031STANDARDPROBESETTINGNOTCOMPLETEDM0031STANDARD探头设置未完成M0032PROBESETTINGSOVERLIMITM0032PROBE