刻蚀机腔室结构特性分析与工艺性能参数优化

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1、目录目录中文摘要..........................................................................................................................................I英文摘要....................................................................................................................

2、...................III1绪论..............................................................................................................................................11.1课题来源和背景.........................................................................................

3、..............................11.2刻蚀机概况...............................................................................................................................21.2.1刻蚀机发展概况........................................................................................

4、........................21.2.2刻蚀工艺概述....................................................................................................................51.3文献综述...........................................................................................................

5、........................61.3.1均匀性研究概况................................................................................................................71.3.2刻蚀工艺或腔室结构优化设计概况................................................................................91.4课题学术和实用意义....

6、.........................................................................................................101.5本文研究内容和组织结构.....................................................................................................112刻蚀机腔室结构和工艺参数的二维刻蚀特性分析.....................

7、..................132.1刻蚀机腔室建模.....................................................................................................................132.1.1刻蚀机腔室结构与刻蚀原理..........................................................................................132.2数值模型..

8、...............................................................................................................................142.