应用于汽车的流量传感器研究

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1、2012-07-丽滟欄湖糊醐翻桝2^Tenl侧稱湘相攤蜘卿耐€...■YUBoilin'丄3，GANZhi2yin1，33，LUOXiao2binf，CAOHui13,XVJin^ping11.InstituteofMicrosysterns,HuazhongUniversityofScienceandTechnology,Wuhan430074,China;2.DepartmentofElectronicScienceandTechnology，HuazhongUniversityofScienceandTechnology，WuhanChina:3.Wuh

2、anNationalLabofOptoelectronics9HuazhongUniversityofScience&Technology，Wuhan430074,China;、4.SchoolofEnergyandPowerEngineeringfHuazhongUniversityofScience&Technology，Wuhan430074.ChinaAbstract:Thethermalfilmflowsensorhasbeenresearched.Themembraneismadeofmulti2filmwithhighmechanicalrobu

3、stnessandlowcrossdirectionthermalconductivity.Thetemperaturedistributionofmem2branehasbeensimulated;thevariationoftemperatureonmembranehasbeenanalyzedatdifferentflowrate.Bycomparingtheresultsofexperimentwiththeresultsofsimulation，aconformingconclusionisob2tained:atlowflowrate，thefal

4、lingoftemperatureinupstreambycooleffectisremarkable，thetempera!tureindownstreamincreasesslightly，andthetemperaturedifferencebetweenupstreamanddownstreamisnotable.Withtheflowrateincreasing，thetemperatureinupstreamdistancereachessaturation，andbe2causethereisawholecooleffectonthechipat

5、highflowrate，thetemperatureindownstreamdistancebe2ginstodecreaseslightly.Therefore，theflowmeasuringrangeobtainedbytemperaturevariationofdis2tancemeasuringresistorissmall.Twopairsofmeasuringresistorsareplacedinupstreamanddownstreamrespectively，whichenhancesthemeasuringprecisionandwid

6、ensmeasuringrange.Comparingwithsingleoutputvoltagevalue，thesuperpositionvalueishighalot.Thepeakvalueofsinglevoltagesignalreaches15.7mV，whereas,thepeakvalueofsuperpositionvoltagecanreach28.6mVMeanwhile,measuringrangehasbeenbroadened.Keywords:flowsensor;multi2film;temperaturesimulati

7、on;calorimetrictypeEEACC:7230;7320W应用于汽车的流量传感器研究余柏林1’2’3，甘志银1’33，罗小兵3’4，曹蕙13，徐静平21.华中科技大学微系统研究中心，武汉430074;2.华中科技大学电子学与技术系，武汉430074?3.华中科技大学武汉光电国家实验室，武汉430074;4.华中科技大学能源与动力工程学院，武汉430074摘要:研究了横膈膜式热膜流量传感器，横膈膜采用多层薄膜结构，增加其机械强度，同时保持其较低的横向热导率。模似了横膈膜上温度的分布，分析了在不同流速下各点的温度变化。通过实验和理论模似，得到了比较一致

8、的结论：在低流a下，上游的冷却作用使温