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1、2012-07-1T9h#e#R#es#ea#r#ch#o#f#F#lo#w#S#e2ns0o1r2Ba-s0ed7-on1A9p#p#li#ca#ti#on#2#0of#1A2u-to0m7o-b1ile9########YUBo2lin1,2,3,GANZhi2yin1,33,LUOXiao2bing3,4,CAOHui1,3,XUJing2ping21.InstituteofMicrosystems,HuazhongUniversityofScienceandTechnology,Wuha
2、n430074,China;2.DepartmentofElectronicScienceandTechnology,HuazhongUniversityofScienceandTechnology,WuhanChina;3.WuhanNationalLabofOptoelectronics,HuazhongUniversityofScience&Technology,Wuhan430074,China;4.SchoolofEnergyandPowerEngineering,HuazhongUn
3、iversityofScience&Technology,Wuhan430074,ChinaAbstract:Thethermalfilmflowsensorhasbeenresearched.Themembraneismadeofmulti2filmwithhighmechanicalrobustnessandlowcrossdirectionthermalconductivity.Thetemperaturedistributionofmem2branehasbeensimulated;th
4、evariationoftemperatureonmembranehasbeenanalyzedatdifferentflowrate.Bycomparingtheresultsofexperimentwiththeresultsofsimulation,aconformingconclusionisob2tained:atlowflowrate,thefallingoftemperatureinupstreambycooleffectisremarkable,thetempera2turein
5、downstreamincreasesslightly,andthetemperaturedifferencebetweenupstreamanddownstreamisnotable.Withtheflowrateincreasing,thetemperatureinupstreamdistancereachessaturation,andbe2causethereisawholecooleffectonthechipathighflowrate,thetemperatureindownstr
6、eamdistancebe2ginstodecreaseslightly.Therefore,theflowmeasuringrangeobtainedbytemperaturevariationofdis2tancemeasuringresistorissmall.Twopairsofmeasuringresistorsareplacedinupstreamanddownstreamrespectively,whichenhancesthemeasuringprecisionandwidens
7、measuringrange.Comparingwithsingleoutputvoltagevalue,thesuperpositionvalueishighalot.Thepeakvalueofsinglevoltagesignalreaches15.7mV,whereas,thepeakvalueofsuperpositionvoltagecanreach28.6mV.Meanwhile,measuringrangehasbeenbroadened.Keywords:flowsensor;
8、multi2film;temperaturesimulation;calorimetrictypeEEACC:7230;7320W应用于汽车的流量传感器研究余柏林1,2,3,甘志银1,33,罗小兵3,4,曹蕙1,3,徐静平21.华中科技大学微系统研究中心,武汉430074;2.华中科技大学电子学与技术系,武汉430074;3.华中科技大学武汉光电国家实验室,武汉430074;4.华中科技大学能源与动力工程学院,武汉430074摘要:研究了横膈膜式热膜流量传感器,横膈膜采用多层薄膜结构,增加其机械
