基于光学扫描法的导轨直线度测量方法

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1、摘要：基于多测头光学扫描法对导轨直线度的在位测量方法，提出一种新的倾角补偿的三测头扫描方法。介绍了测量原理，推导了基于最小二乘法的直线度形状重构方法，重构出的形状可精确反映直线度误差的高频成分，且对测量噪声有良好抑制能力。对算法进行了仿真验证，并由实验验证了提出方法的有效性。实验结果表明，该方法可以精确地还原出台阶状的直线度形状，测量标准偏差在10um以内。关键词：扫描测量；直线度；三测头法；倾角补中图分类号:TH711文献标志码:Adoi：10.3969/j.issn.10055630.2015.02.001Straightnessmeasuremento

2、fguiderailbasedonopticalscanningmethodFANGChuanming,CHENChangjun(SchoolofMechanicalandElectricEngineering,SoochowUniversity，Suzhou215006，China)Abstract：Anonlinemeasurementmethodofstraightnessisstudiedbasedonmultiprobeopticalscanningmethod.Athreeprobescanningmethodwithtiltcompensati

3、onisproposed.Reconstructedformcanaccuratelyexpressthehighfrequencyelementsofthestraightnesserror,andownsbettersuppressioncapabilityofthemeasurementnoise.Themeasurementprincipleoftheproposedmethodisintroducedfirstly.Theconstructionalgorithmofthestraightnesserrorsisdeducedbasedonthel

4、eastsquaresolutionandthecomputersimulationisperformed.Theexperimentalsystemisbuiltforverificatingthevalidityoftheproposedmethod.Theexperimentalresultsshowthattheproposedmethodcanaccuratelyreconstructthestraightnesserrorsofstepform,andthestandarddeviationislessthan10micrometer.Keywo

5、rds：scanningmeasurement；straightness；threeprobemethod；tiltcompensation引言直线度误差是导轨加工件的主要形位误差。对于运动平台导轨，直线度误差直接影响着机床、测量机的精度、稳定性和寿命等［13］。为了测量导轨表面轮廓的直线度，常常采用扫描探头法［4］。根据采用位移传感器数量的不同，测量导轨直线度的探头扫描scanningmethod.Athreeprobescanningmethodwithtiltcompensationisproposed.Reconstructedformcanaccu

6、ratelyexpressthehighfrequencyelementsofthestraightnesserror,andownsbettersuppressioncapabilityofthemeasurementnoise.Themeasurementprincipleoftheproposedmethodisintroducedfirstly.Theconstructionalgorithmofthestraightnesserrorsisdeducedbasedontheleastsquaresolutionandthecomputersimul

7、ationisperformed.Theexperimentalsystemisbuiltforverificatingthevalidityoftheproposedmethod.Theexperimentalresultsshowthattheproposedmethodcanaccuratelyreconstructthestraightnesserrorsofstepform,andthestandarddeviationislessthan10micrometer.Keywords：scanningmeasurement；straightness；

8、threeprobemethod；tiltcompe