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1、密级’无？分类号ＴＨ７４１方知＾掌＿Ｘ＇ＩＡＮＴＥＣＨＮＯＬＯＧＩＣＡＬＵＮＩＶＥＲＳＩＴＹ硕士学位论文题目？：平面光学元件表面面形参数测量评价研究作者：刘佳妮指导教师：田爱玲教授申请学位学科：光学工程２０１８年５月２０日密级无分类号TH741XI’ANTECHNOLOGICALUNIVERSITY硕士学位论文题目:平面光学元件表面面形参数测量评价研究作者：刘佳妮指导教师：田爱玲教授申请学位学科：光学工程2018年5月20日与轮廓仪测量结果偏差较小，其中
2、，最小二乘中线下的评定结果最接近轮廓仪的测量结果。采用方差分析法对仪器的重复性和再现性进行评定，NewViewTM8000Series3D光学表面轮廓仪的%GRR等于25.65%，依据评判标准，可知该仪器可以正常使用。通过仿真和实验研究，对评价参数的稳定性和关联性、轮廓仪的一致性进行分析，为光学元件表面质量的评价提供了参考，具有重要的意义。关键词：光学元件；面形评价；Zernike拟合；功率谱密度（PSD）；重复性；再现性PVqandPVrisbetterthanthatofPV,PVmandPV20.Byana
3、lyzingtherelationshipbetweenthepeak-to-valleyandRMSvaluesinthesingle-componentaberration,themultiple-componentintegratedwavefrontandtheactualmeasuredwavefront,singleplaneaberrationormultipleaberrationsyntheticimagecanbeevaluatedbysinglePVvalueorRMSvalue.Howev
4、er,fortheactualmeasuredwavefront,parametersneedtobecomprehensivelyevaluatedbyPVandRMSparameters.Finally,theFormTalysurfPGIOpticsContactProfilerandtheNewView™8000Series3DOpticalProfilerareusedtomeasurethesampleswithdifferentmicrostructures,andanalysewhetherthe
5、choiceofthesamplingpoints,measurementrangeandbaselineselectionwouldeffectresults.Bysettingthesamplinglength,calculatingtheGaussianfiltercenterline,theleastsquaresmedianlineandtheleastsquarecurve,theroughnessvaluesunderdifferentevaluationstandardsarecalculated
6、.Whentheevaluationlengthisequaltothesamplinglengthoffivesections,theroughnessvaluesunderthethreeevaluationcriteriahavelittledeviationfromtheprofilometermeasurementresults,andtheresultsoftheleastsquaresneutrallinearetheclosesttotheresultsoftheprofilometermeasu
7、rement.Theanalysisofvarianceisusedtoassessinstrumentrepeatabilityandreproducibility,andthe%GRRoftheNewView™8000Series3Dopticalsurfaceprofilometerisequalto25.65%,accordingtothejudgmentstandard,theinstrumentcanbeusednormallyundercertainconditions.Throughthesimu
8、lationandexperimentalresearch,wecanfindthatthemostimportantsignificanceistheanalysisinstabilityandrelevanceoftheevaluationparametersandtheconsistencyoftheprofileinstrument,whichprovidesar
