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1、密级’无?分类号TH741方知^掌_X'IANTECHNOLOGICALUNIVERSITY硕士学位论文题目?:平面光学元件表面面形参数测量评价研究作者:刘佳妮指导教师:田爱玲教授申请学位学科:光学工程2018年5月20日密级无分类号TH741XI’ANTECHNOLOGICALUNIVERSITY硕士学位论文题目:平面光学元件表面面形参数测量评价研究作者:刘佳妮指导教师:田爱玲教授申请学位学科:光学工程2018年5月20日与轮廓仪测量结果偏差较小,其中
2、,最小二乘中线下的评定结果最接近轮廓仪的测量结果。采用方差分析法对仪器的重复性和再现性进行评定,NewViewTM8000Series3D光学表面轮廓仪的%GRR等于25.65%,依据评判标准,可知该仪器可以正常使用。通过仿真和实验研究,对评价参数的稳定性和关联性、轮廓仪的一致性进行分析,为光学元件表面质量的评价提供了参考,具有重要的意义。关键词:光学元件;面形评价;Zernike拟合;功率谱密度(PSD);重复性;再现性PVqandPVrisbetterthanthatofPV,PVmandPV20.Byana
3、lyzingtherelationshipbetweenthepeak-to-valleyandRMSvaluesinthesingle-componentaberration,themultiple-componentintegratedwavefrontandtheactualmeasuredwavefront,singleplaneaberrationormultipleaberrationsyntheticimagecanbeevaluatedbysinglePVvalueorRMSvalue.Howev
4、er,fortheactualmeasuredwavefront,parametersneedtobecomprehensivelyevaluatedbyPVandRMSparameters.Finally,theFormTalysurfPGIOpticsContactProfilerandtheNewView™8000Series3DOpticalProfilerareusedtomeasurethesampleswithdifferentmicrostructures,andanalysewhetherthe
5、choiceofthesamplingpoints,measurementrangeandbaselineselectionwouldeffectresults.Bysettingthesamplinglength,calculatingtheGaussianfiltercenterline,theleastsquaresmedianlineandtheleastsquarecurve,theroughnessvaluesunderdifferentevaluationstandardsarecalculated
6、.Whentheevaluationlengthisequaltothesamplinglengthoffivesections,theroughnessvaluesunderthethreeevaluationcriteriahavelittledeviationfromtheprofilometermeasurementresults,andtheresultsoftheleastsquaresneutrallinearetheclosesttotheresultsoftheprofilometermeasu
7、rement.Theanalysisofvarianceisusedtoassessinstrumentrepeatabilityandreproducibility,andthe%GRRoftheNewView™8000Series3Dopticalsurfaceprofilometerisequalto25.65%,accordingtothejudgmentstandard,theinstrumentcanbeusednormallyundercertainconditions.Throughthesimu
8、lationandexperimentalresearch,wecanfindthatthemostimportantsignificanceistheanalysisinstabilityandrelevanceoftheevaluationparametersandtheconsistencyoftheprofileinstrument,whichprovidesar