精仪学院 微纳加工 期末考试 论文翻译 聚焦离子束

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1、ABSTRACTAnovelmethodofionimplantationsurfacemodificationforcuttingsinglecrystalsiliconisproposed.Thismethodmodifiesthemechanicalpropertiesofthematerial’ssurfacelayer,whichprovidesapossibilitytoreducesurfacefractures,prolongtoollifeandincreasethemachiningefficiencyduringthecuttingprocess.The

2、mechanismofbothimplantationsurfacemodificationandnanometriccuttingisstudiedusingtransmissionelectronmicroscopy,Ramanspectroscopy,nano-indentationandmoleculardynamicssimulation.Experimentsincludingtapercutting,faceturningandasphericsurfacegenerationareconductedtoverifythemethod.Theresultsp

3、rovethatthemethodisviabletofabricatecomplexsiliconsurfacegeometryandprolongtoollife.本文提出了一种离子注入辅助切削单晶硅表面的新方法。这种方法改变材料表面层的机械性能，提供了减少表面断裂，延长刀具寿命一届增加切削过程中的加工效率的可能性。本文用透射电镜（TEM），拉曼光谱，纳米压痕和分子动力学仿真的方法，研究表面注入和纳米级切削的机制。包括锥形切削，表面车削和非球面生成的实验旨在核实这种方法。结果证明，这种方法可以完成复杂几何表面的硅加工并延长工具寿命。1.IntroductionSin

4、glecrystalsiliconiswidelyusedininfraredopticsandelectronicapplications[1].However,itsbrittlenatureatambienttemperature[2]preventsitfromproducingintricatefeaturesandopticalqualitysurfaces.Traditionally,singlecrystalsiliconismanufacturedthroughprocessessuchasgrinding,polishingandlapping.Ul

5、tra-precisioncuttingwithdiamondtoolshasbeensuggestedasareplacementwhichcanmaketheproductionofsiliconcomponentswithnanometricsurfacefinishandsub-micronlevelgeometryaccuracypossible[3].Mirrorsurfacesonsinglecrystalsiliconhavebeenachievedbyductilecuttingundercertainparameters[4,5].However,th

6、eshorttoollifeandsurfacefracturesarestilltheseriousproblemstobesolvedinachievingnanometricsurfacesofsiliconcomponents.Ionimplantationsurfacemodificationofsinglecrystalsiliconhasattractedsignificantinterestsrecently[6].Itmodifiesthemechanicalpropertiesofthesurfacelayeroftheworkpiece,whichpro

7、videsapossibilitytoprolongthetoollife,reducesurfacefractureandincreasetheefficiencyofthesiliconmachiningprocess.Inthispaper,anovelmethodofionimplantationsurfacemodificationfornanometriccuttingofsinglecrystalsiliconisproposed.Themechanismofbothimplantationsurfacemodifica-tion