欢迎来到天天文库
浏览记录
ID:12734750
大小:24.59 KB
页数:5页
时间:2018-07-18
《精仪学院 微纳加工 期末考试 论文翻译 聚焦离子束》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库。
1、ABSTRACTAnovelmethodofionimplantationsurfacemodificationforcuttingsinglecrystalsiliconisproposed.Thismethodmodifiesthemechanicalpropertiesofthematerial’ssurfacelayer,whichprovidesapossibilitytoreducesurfacefractures,prolongtoollifeandincreasethemachiningefficiencyduringthecuttingprocess.The
2、mechanismofbothimplantationsurfacemodificationandnanometriccuttingisstudiedusingtransmissionelectronmicroscopy,Ramanspectroscopy,nano-indentationandmoleculardynamicssimulation.Experimentsincludingtapercutting,faceturningandasphericsurfacegenerationareconductedtoverifythemethod.Theresultsp
3、rovethatthemethodisviabletofabricatecomplexsiliconsurfacegeometryandprolongtoollife.本文提出了一种离子注入辅助切削单晶硅表面的新方法。这种方法改变材料表面层的机械性能,提供了减少表面断裂,延长刀具寿命一届增加切削过程中的加工效率的可能性。本文用透射电镜(TEM),拉曼光谱,纳米压痕和分子动力学仿真的方法,研究表面注入和纳米级切削的机制。包括锥形切削,表面车削和非球面生成的实验旨在核实这种方法。结果证明,这种方法可以完成复杂几何表面的硅加工并延长工具寿命。1.IntroductionSin
4、glecrystalsiliconiswidelyusedininfraredopticsandelectronicapplications[1].However,itsbrittlenatureatambienttemperature[2]preventsitfromproducingintricatefeaturesandopticalqualitysurfaces.Traditionally,singlecrystalsiliconismanufacturedthroughprocessessuchasgrinding,polishingandlapping.Ul
5、tra-precisioncuttingwithdiamondtoolshasbeensuggestedasareplacementwhichcanmaketheproductionofsiliconcomponentswithnanometricsurfacefinishandsub-micronlevelgeometryaccuracypossible[3].Mirrorsurfacesonsinglecrystalsiliconhavebeenachievedbyductilecuttingundercertainparameters[4,5].However,th
6、eshorttoollifeandsurfacefracturesarestilltheseriousproblemstobesolvedinachievingnanometricsurfacesofsiliconcomponents.Ionimplantationsurfacemodificationofsinglecrystalsiliconhasattractedsignificantinterestsrecently[6].Itmodifiesthemechanicalpropertiesofthesurfacelayeroftheworkpiece,whichpro
7、videsapossibilitytoprolongthetoollife,reducesurfacefractureandincreasetheefficiencyofthesiliconmachiningprocess.Inthispaper,anovelmethodofionimplantationsurfacemodificationfornanometriccuttingofsinglecrystalsiliconisproposed.Themechanismofbothimplantationsurfacemodifica-tion
此文档下载收益归作者所有