半导体工艺学silvaco仿真实例——扩散

《半导体工艺学silvaco仿真实例——扩散》由会员上传分享，免费在线阅读，更多相关内容在行业资料-天天文库。

1、IndiumImplantandAnneal1goathena23#TITLE:IndiumAnneal45#thexdimensiondefinition6linexloc=0.0spacing=0.17linexloc=0.1spacing=0.189#theverticaldefinition10lineyloc=0spacing=0.0211lineyloc=2.0spacing=0.201213#initializethemesh14initsiliconc.phos=1.0e141516#performuniformboronimplant17

2、implantindiumdose=1e13energy=70monte18structureoutfile=andfex12_0.str1920#performdiffusion21diffusetime=30temperature=1000222324extractname="xj"xjsiliconmat.occno=1x.val=0.0junc.occno=12526#savethestructure27structureoutfile=andfex12_1.str2829tonyplot-overlayandfex12_0.strandfex12

3、_1.str-setandfex12.set3031quitOxidationEnhancedDiffusionofBoron1goathena23#OEDofBoron45#thexdimensiondefinition6linexloc=0.0spacing=0.17linexloc=0.1spacing=0.189#theverticaldefinition10lineyloc=0spacing=0.0211lineyloc=2.0spacing=0.2012lineyloc=25.0spacing=2.51314#initializethemesh

4、15initsiliconc.boron=1.0e141617#performuniformboronimplant18implantborondose=1e13energy=701920#setdiffusionmodelforOED21methodtwo.dim2223#performdiffusion24diffusetime=30temperature=1000dryo225#26extractname="xj_two.dim"xjsiliconmat.occno=1x.val=0.0junc.occno=12728#savethestructur

5、e29structureoutfile=andfex02_0.str3031#repeatthesimulationwithdefaultFERMImodel32goathena3334#TITLE:SimpleBoronAnneal3536#thexdimensiondefinition37linexloc=0.0spacing=0.138linexloc=0.1spacing=0.13940#theverticaldefinition41lineyloc=0spacing=0.0242lineyloc=2.0spacing=0.2043lineyloc

6、=25.0spacing=2.54445#initializethemesh46initsiliconc.phos=1.0e144748#performuniformboronimplant49implantborondose=1e13energy=705051#selectdiffusionmodel52methodfermi5354#performdiffusion55diffusetime=30temperature=1000dryo256#57extractname="xj_fermi"xjsiliconmat.occno=1x.val=0.0ju

7、nc.occno=1585960#savethestructure61structureoutfile=andfex02_1.str6263#comparediffusionmodels64tonyplot-overlayandfex02_0.strandfex02_1.str-setandfex02.setEmitterPushEffect1goathena23#TITLE:Emitterpusheffectexample4#5linexloc=0.0spac=0.26linexloc=2.5spac=0.87linexloc=3.0spac=0.28#

8、9lineyloc=0.00spac=0.0410lineyloc