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1、SnO_2∶(Sb,In)透明导电薄膜的制备及其性能研究35??I????Hl?2007??I?3?JI???I??WI???I???I??,I???I???I???(???X?????+)J.HuazhongUniv.ofSci.&Tech.(NatureScienceEdition)Vol.35Sup.l?I?Mar.I?2007?X?Z???d:2006212212.???7?????????u(2),?R,?????v???d;????,???c?,???????????h???b????
2、(6)2yjf@?????????????3???X?????i???????/??????(5F3);???c?,?????v?????/??????(NW5)SnO2pX(Sb,In)?o?h???A???????X?)?????,???v???????uI??V????I???????I???I???I???????(???c?,???????????h???b????,????????710069)????:???;????????(Sol2Gel)???b?X?)??SnO2pX(Sb,In)?
3、???,?&?S???X?)????????,???;???8??????????2(DSC2TGA)I3X?0?????0??(XRD)?k????????????????????.???????h,?b?S???lI3???????C???v???81pX20pX4???n?????3????,???g?????????x???(?@?87%??4%??,?;500l2?OI3?p???J?v?N?u?[??2h?X?)??????????????,?????A?P?,???840.52?,?
4、@?S288%.??I??OI???:????????;???,?S?l;?o?h???A?????W???(????:O484.1I?I????O?)???3:AI?I??????S??:167124512(2007)S120081204PreparationandcharacterizationofSnO2pX(Sb,In)transparentandconductingthinfilmYanJunfengI?ZhangZhiyongI?DengZhouhuI?ZhaoWuI?WangXuewen(S
5、choolofInformationScienceandTechnology,NorthwestUniversity,XiVGan710069,China)Abstract:SnO2pX(Sb,In)thinfilmswerepreparedbysol2gelprocess,inwhichthetechniqueparame2tersofpreparingwereoptimizedandthebetterconditionsofpreparingwerereceived.ThesamplesVGtherm
6、icweightlessness,morphologyandstructurewerecharacterizedbydifferentialscanningcalorim2entryandthermogravimetricanalysis(DSC2TGA),X2raydiffractionandsoon.TheresultindicatesthequalityofcolloidwillbebetterwhenthemolratioofSnCl2,ethanolandwateris1pX20pX4;theu
7、ltraviolet2eyeablelighttransmissionquotietyofthinfilmreaches88%with40.52?sheetresistanceandsmoothsurfaceoffilmwhenthepreparingconditionsarethatrespectivedopingmolproportionofSbandInis7%and4%,thecalciningtimeistwohoursunderthemixingatmosphereofnitrogenandh
8、ydrogenandthecalciningtemperatureis500l2.Keywords:sol2geltechnique;SnO2;transparentandconductingthinfilmI?I??o?h???A???????????;???j?D???A??I3?????Y?8??I3?k?????Y?8??I3?????A???x?????B????/???&??/?B????(SIS)?5?;