Sb掺杂ZnSn03透明导电薄膜制备与性能.pdf

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1、第30卷第5期无机化学学报V01_30No．52014年5月CHINESEJOURNALOFINORGANICCHEMISTRY1212．1220Sb掺杂ZnSnO3透明导电薄膜：制备与性能储晓菲贺蕴秋李一鸣黄河洲刘德宇陈慧敏李文有f同济大学材料科学与工程学院，上海201800)摘要：采用溶胶一凝胶法(So1．Ge1)和旋涂法制备了未掺杂的ZnSnO薄膜和掺入不同物质的量的Sb的ZnSnO薄膜。采用X射线衍射(XRD)、场发射扫描电镜(FE—SEM)、X射线光电子能谱(xPs)、霍尔效应仪(Hal1)I)A及紫外

2、一可见光fUv．Vis)等表征了热处理后薄膜的晶相、微观形貌、晶格缺陷、电学性能以及紫外一可见光透过率。结果表明：所有薄膜都是ZnSnO结构；与未掺Sb的znSnO薄膜相比．掺人Sb后的ZnSn0薄膜的电阻率都有不同程度的降低，其中掺人8mo1％Sb的薄膜具有最低的电阻率0．96Q．cm：缺陷研究表明：Sb的掺入使得晶格中的间隙锌离子含量增加，这有利于薄膜电阻率的降低；薄膜的紫外一可见光(UV—Vis)表明：在波长大于475nm的可见光范围内，掺入Sb的ZnSnO，薄膜的可见光透过率都在80％以上。关键词：导电；

3、透明；薄膜；溶胶一凝胶法中图分类号：O6l文献标识码：A文章编号：1001—4861(2014)05．1212—09DoI：10．11862／CJIC．2014．169SbDopedZnSnOsTransparentandConductingThinFilms：PreparationandPropertyCHUXiao—FeiHEYun—QiuLIYi—MingHUANGHe—ZhouLIUDe—YuCHENHui—MinLIWen—You(DepartmentofM~endsScienceandEngineer

4、ing,TongiUniversity，Shanghai，201800，China)Abstract：UndopedandSbdopedZnSnO3thinfilmsweresynthesizedbyasol—gelspin—coatingmethod．Acomparativestudybetweenthesefilmswaspresented．Thestructure，electricalandopticalpropertiesofZnSnO3thinfilmsdopedwith0mo1％，lmo1％，8mo1

5、％and30mo1％ofSbwereinvestigatedbyX—raydiffraction(XRD)，fieldemission-scanningelectronmicroscope(FE—SEM)，X—rayphotoelectronspectroscope(XPS)，Hallmeasurementandultraviolet-visiblespectroscope(UV—Vis)．TheresultsshowthatallfilmscorrespondtoapurephaseofZnSnO3struct

6、ureandthatSbdopedZnSnO3filmshavelowerresistivitythanthoseofundopedZnSnO3films．TheminimumresistivityisobtainedinZnSnO3filmsdopedwith8．0mo1％ofSb．Inaddition，interstitialzincionsintroducedbyantimonyiondopinginZnSnO3crystallatticeleadtoabetterconductivity．Furtherm

7、ore，alldopedZnSnO3filmsarewith>80％transmittanceintheregionabove475nm．Keywords：conducting；~ansparent；films；sol-gel0Introductionandhightransparenceinthevisibleregion【．TCOssuchasindiumtinoxidefITO1[5-61，tinfluorineoxideTransparentandconductingoxide(TCOs)thin(FTO

8、)~andzincaluminiumoxide(AZO)吲havebeenfilmshavebeenwidelyusedinflat—paneldevices，widelyusedrecently．However，oneoxidecannotmeetphotovohaicdevices，lightemittingdiodeandotherdifferentapplicat