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ID:49848076
大小:1.57 MB
页数:84页
时间:2020-03-05
《Terahertz Time of Flight Detection For Absolute Thickness Measurement Of Single Side Polished Silicon Wafers.pdf》由会员上传分享,免费在线阅读,更多相关内容在教育资源-天天文库。
1、TERAHERTZTIMEOFFLIGHTDETECTIONFORABSOLUTETHICKNESSMEASUREMENTOFSINGLESIDEPOLISHEDSILICONWAFERSbyJavaidIkramAthesissubmittedtothefacultyofTheUniversityofNorthCarolinaatCharlotteinpartialfulfillmentoftherequirementsforthedegreeofMasterofScienceinOpticalScienceandEngineeringCharlotte2010Approve
2、dby_______________________Dr.AngelaD.Davies_______________________Dr.FaramarzFarahi_______________________Dr.Tsing-HuaHer_______________________Dr.RobertHockenii©2010JavaidIkramALLRIGHTSRESERVEDiiiABSTRACTJAVAIDIKRAM.Terahertztimeofflightdetectionforabsolutethicknessmeasurementsofsinglesided
3、siliconwafers.(UnderthedirectionofDR.ANGELAD.DAVIES)Wepresentasolutionforamajorchallengeinsemiconductormanufacturing,whichisthemeasurementoftheabsolutethicknessofsinglesidepolishedsiliconwafers.Ourthesisisthatterahertztimeofflightdetectioncanbeusedinothernon-destructivemeasurementapplication
4、sinprecisionengineering.Inparticular,weproposethatthismethodcanbeusedtomeasurethethicknessofsingle-sidedsiliconwafers.Atransmissionmodeterahertztimeofflightsystemwasdesigned,constructedandusedtodemonstratethistechnique.Ameasurementcapabilityandcorrelationanalysisofoursystemwasperformedbychar
5、acterizingthethicknessoflightlydopedsiliconwafers.Thisisachallengingmeasurementinamanufacturingenvironmentandaterahertzapproachrepresentsasignificantadvance.Furthermore,theabsolutethicknessmeasurementandrefractiveindexestimateofanunknownmaterialwasperformed.Theresultsshowthattheterahertztime
6、offlightmetrologysystemisrepeatableandhasameasurementspeedoflessthen2minutesmakingitsuitableforhighvolumeprocesscontrol.ivDEDICATIONTomyparents,thesourceofendlessloveandsupport.vACKNOWLEDGEMENTSIwouldliketothankmyadvisorDr.AngelaDavieswhodirectedthisprojectwithvision,eleganceandpatience.With
7、outherguidanceandsupportIwouldneverhavebeenabletocompletethisproject.IwouldliketothankDr.FaramarzFarahiandDr.RobertHockenforguidingmeatcriticalstagesoftheprojectwithbrilliantideasandsolutions.IwouldalsoliketoexpressmysinceregratitudetoDr.Tsing-HuaH
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