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1、JOURNALOFMICROELECTROMECHANICALSYSTEMS,VOL.9,NO.3,SEPTEMBER2000321ElectrostaticMicromechanicalActuatorwithExtendedRangeofTravelEdwardK.ChanandRobertW.Dutton,Fellow,IEEEAbstract—Thepracticaldesignissuesofanelectrostaticunstableregime.Nofabricateddeviceshavebeende
2、monstratedmicromechanicalactuatorthatcantravelbeyondthetrademarktodate.Theseriesfeedbackcapacitancemethodintroducedbylimitofconventionalactuatorsarepresentedinthispaper.Theac-Seegeretal.employsacapacitorinserieswiththeelectrostatictuatoremploysaseriescapacitorto
3、extendtheeffectiveelectricalactuatortoextendtheeffectiveelectricalgapoftheactuator.gapofthedeviceandtoprovidestabilizingnegativefeedback.Sourcesofparasitics—fromlayoutandtwo—dimensionalnonuni-Thatway,themovableelementcantraveluptoone-thirdoftheformdeformation—th
4、atlimittheactuationrangeareidentifiedneweffectivegap,whichislargerthantheentireinitialgapofandtheireffectsquantified.Two“foldedcapacitor”designsthattheoriginalactuator.Theconceptissimpleandtheresultantde-minimizetheparasiticsandarestraightforwardtoimplementinvic
5、eiscompact—notanylargerthanaconventionaldevice—butmultiusermicroelectromechanicalprocessesareintroduced.Thethepracticaldesignissues,neglectedin[3]–[5],requireatten-effectsofresidualchargeareanalyzed,andalinearelectrostaticactuatorexploitingthoseeffectsisproposed
6、.Extendedtravelistion.achievedinfabricateddevices,butisultimatelylimitedbytiltingInthispaper,therealisticdesignissuesinvolvedindesigninginstabilities.Nevertheless,theresultantdesignsaresmallerthanafull-gappositionerarepresentedalongwithmeasurementsdevicesbasedon
7、otherextended-traveltechnologies,makingthemoffabricateddevicesandanalysesoftheirperformance.Afterattractiveforapplicationsthatrequirehighfillfactors.[512]introducingthetheoryofoperationofthedevice,theeffectsofIndexTerms—Electromechanicalactuator,extendedtravel,p
8、arasiticcapacitances,bothfromlayoutandfromoperation,foldedcapacitor,parasitics,residualcharge,stability,tilt.arediscussed.A“foldedcapacitor”structureisintroducedthatl