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ID:36430325
大小:4.37 MB
页数:59页
时间:2019-05-10
《DBDPECVD法制备氟碳聚合物薄膜及二氧化硅薄膜的研究》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库。
1、Y1404965分类号:UDC:THl40.7学校代号:10150峡建交烈挚硕士学位论文DBD-PECVD法制备氟碳聚合物薄膜及二氧化硅薄膜的研究Investigationoffluorocarbonf'llmsandSi02mmsbyDBD--PECVD学生姓名:尹晔瑁导师及职称:王东屏教授李东明副教授刘东平教授学科门类:专业名称:研究方向:申请学位级别:论文答辩日期:学位授予单位:工学机械电子工程机电设备的微电子化与智能化技术硕士2008年6月4日大连交通大学大连交通大学工学硕十学位论文AbstractPlasmadepositedfluoro
2、carbon(a.C:F)filmshavebeenwidelystudiedbecauseoftheirremarkableproperties,includingsuperhydrophobicity,alowdielectricconstant(1.6-2.1)andbiocompatibility.Applicationsforsuchfilmsincludedielectriclayersfortheultra-largescaleintegrationdevices,biopassivationcoatingsforimplantabl
3、edevices,andhydrophobiclayersonpaper.Withthemicro—electronicstechniqueandthelargescaleintegrationofthefastdevelopment,theSi02thinfilmhavebeenwidelyusedinthemanufacturingoflargescaleintegrationbecauseofitsstablechemicalpropertiesandelectricinsulation,Somakingsilicon—oxidethinfi
4、lmbecomeoneofthekeycraftwithintechniqueoftheintegratedcircuitmanufacturing.Andsilicon—oxideishi曲hardness,goodwearable,adiabatic,thehi曲rateoflightpermeation,thestrongabilityofanti-erosionandlowlieelectricityproperty.Dielectricbarrierdischargeshavebeensuccessfullyusedtodepositfl
5、uorocarbon(a-C:F)filmsonvariousmaterials,suchaspaper,glass,andsiliconsubstrates.Theprimarymonomersusedforplasmapolymerizationwereoctafluorocyclobutane(C4Fs),octafluoropropane(C3F8),anddifluoromethane(CH2F2).a-C:FfilmswerecharacterizedusingFouriertransforminfraredspectroscopy,s
6、canningelectronmicroscopy,atomicforcemicroscopyandstaticcontactanglemeasurements.Surfaceandstructuralpropertiesofdepositedfilmsarestronglydependentontheplasmacompositionsanddischargepressure.a-C:FfilmsdepositedonPaperaretoenhanceitsbarrierpropertiesandtoachievehydrophobicsurfa
7、ces.Contactanglestudiesrevealthataminimuma-C:Ffilmthicknessofabout160nmonpaperisrequiredtocompletelycoversurfaceandnear-surfacefibers,therebyprovidingthepaper、析nllongtermhydrophobiccharacter.IntheC3F8andC4Fssystems,thecontactanglesofthedepositedfilmsdonotchangeappreciablywithp
8、lasmaparametersandarestronglydependentonthesubstrateroughness
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