DBDPECVD法制备氟碳聚合物薄膜及二氧化硅薄膜的研究

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1、Y1404965分类号：UDC：THl40．7学校代号：10150峡建交烈挚硕士学位论文DBD-PECVD法制备氟碳聚合物薄膜及二氧化硅薄膜的研究Investigationoffluorocarbonf'llmsandSi02mmsbyDBD--PECVD学生姓名：尹晔瑁导师及职称：王东屏教授李东明副教授刘东平教授学科门类：专业名称：研究方向：申请学位级别：论文答辩日期：学位授予单位：工学机械电子工程机电设备的微电子化与智能化技术硕士2008年6月4日大连交通大学大连交通大学工学硕十学位论文AbstractPlasmadepositedfluoro

2、carbon(a．C：F)filmshavebeenwidelystudiedbecauseoftheirremarkableproperties，includingsuperhydrophobicity，alowdielectricconstant(1．6-2．1)andbiocompatibility．Applicationsforsuchfilmsincludedielectriclayersfortheultra-largescaleintegrationdevices，biopassivationcoatingsforimplantabl

3、edevices，andhydrophobiclayersonpaper．Withthemicro—electronicstechniqueandthelargescaleintegrationofthefastdevelopment，theSi02thinfilmhavebeenwidelyusedinthemanufacturingoflargescaleintegrationbecauseofitsstablechemicalpropertiesandelectricinsulation,Somakingsilicon—oxidethinfi

4、lmbecomeoneofthekeycraftwithintechniqueoftheintegratedcircuitmanufacturing．Andsilicon—oxideishi曲hardness，goodwearable，adiabatic，thehi曲rateoflightpermeation，thestrongabilityofanti-erosionandlowlieelectricityproperty．Dielectricbarrierdischargeshavebeensuccessfullyusedtodepositfl

5、uorocarbon(a-C：F)filmsonvariousmaterials，suchaspaper，glass，andsiliconsubstrates．Theprimarymonomersusedforplasmapolymerizationwereoctafluorocyclobutane(C4Fs)，octafluoropropane(C3F8)，anddifluoromethane(CH2F2)．a-C：FfilmswerecharacterizedusingFouriertransforminfraredspectroscopy，s

6、canningelectronmicroscopy，atomicforcemicroscopyandstaticcontactanglemeasurements．Surfaceandstructuralpropertiesofdepositedfilmsarestronglydependentontheplasmacompositionsanddischargepressure．a-C：FfilmsdepositedonPaperaretoenhanceitsbarrierpropertiesandtoachievehydrophobicsurfa

7、ces．Contactanglestudiesrevealthataminimuma-C：Ffilmthicknessofabout160nmonpaperisrequiredtocompletelycoversurfaceandnear-surfacefibers，therebyprovidingthepaper、析nllongtermhydrophobiccharacter．IntheC3F8andC4Fssystems，thecontactanglesofthedepositedfilmsdonotchangeappreciablywithp

8、lasmaparametersandarestronglydependentonthesubstrateroughness