一种回转基准径向误差分离方法研究

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1、哈尔滨工业大学工学硕士学位论文AbstractNanometricerrorcompensationtechniqueisproposedwiththedevelopment ofnanotechnogy,whichinheritstheadvantagesofthetraditionalerror compensationtechnique.Thistechniquehasimportantvaluesofresearchand applicationforhigheraccuracymeasurement.Err

2、orseparationtechniqueisan essentialpartoferrorcompensationtechnique,duetoharmonicsuppression,the separationprecisionisverylimited.Inthispaper,theoreticalerroranalysisofseveralerrorseparationmethodsis performed,basedontheadvantagesanddisadvantagesofthesemethods,

3、amulti- seriesmulti-stepmethodisproposed.Thismethodsynthesizesseveralmulti-step methods,analyzesthecorrespondingharmoniconebyoneandeliminatesthe itemsthatbringharmonicsuppression.Multi-seriesmulti-stepmethodenlarges therangewithoutharmonicsuppressionbysynthesis

4、ofharmonictoseparatethe mainshaftcircumgyrationerror.Thefollowingworkswasfinishedinthisthesis:1.Analyzestheprincipleofmulti-steperrorseparationtechniqueandthe harmonicsuppressionproblem.Theemulationresultfor10stepsindexing methodindicatesthaterrorofseparationis

5、0.305and0.346;2.Analyzestheprincipleofmulti-seriesmulti-stepmethod.Make simulationofmulti-seriesmulti-stepmethodbasedon3,4,5multi-stepmethod, whichindicatesthatmulti-seriesmulti-stepmethodcouldresolveharmonic suppressionprobleminacertainrangewithahigherprecisio

6、n.Whenthesample numberis512,theerrorofseparationisabout0.041and0.046;3.Analyzestheeffectofsamplenumbertotheprecisionoferrorseparation. Theprecisioncanbeimprovedbyincreasingthesamplenumber.Whenthe samplenumberis1024,theerrorofseparationisupto0.027and0.031; 4.Ana

7、lyzestheseparationprecisionindifferentfilteringrange,which indicatesthatlargefilteringrangeresultsinlowprecision;5.Experimentcertificationonmulti-seriesmulti-steperrorseparationis performed.Experimentdataindicatesthatthistechniquehasveryhighseparation precision

8、.Theseparationprecisionisupto4.2nm.-III-哈尔滨工业大学工学硕士学位论文Boththetheoreticalanalysisandtheexperimentstronglysuggestthatmulti-seriesmulti-steperrorseparationtechniquehasgoodmane