cmos集成电路制造工艺流程

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1、------------------------------------------------------------------------------------------------CMOS集成电路制造工艺流程陕西国防工业职业技术学院课程报告课程微电子产品开发与应用姓名及学号王京（24#）任课教师张喜凤目录摘要............................................................................................................................

2、..............2引言..........................................................................................................................................2关键词..............................................................................................................................

3、........21.CMOS器件..........................................................................................................................21.1分类...............................................................................................................—————————————————————————————

4、—————————------------------------------------------------------------------------------------------------......................22.CMOS集成技术发展..........................................................................................................33.CMOS基本的制备工艺过程.......................

5、.....................................................................33.1衬底材料的制备.................................................................................................................34.主要工艺技术...................................................................................

6、...................................35.光刻.......................................................................................................................................46.刻蚀.........................................................................................................

7、............................46.1湿法刻蚀.............................................................................................................................46.2干法刻蚀...............................................................................................................—————

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