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1、PaperNumber: abstractnumber(667),programnumber(GP-28)TitleofPaper:Effectoflow-temperaturesupercriticalfluidtechnologytreatmentontheperformanceofZnOTFTsName:Min-ChenChenCorrespondingAuthor:Ting-ChangChangFullMailingAddress: DepartmentofPhysics,NationalSunYat-SenUniversity,70Lien-HaiRoad,Kaohsiun
2、g,Taiwan80424,ROC.Telephone:+886-7-5252000-3708Fax:+886-7-5253709e-mail:tcchang@mail.phys.nsysu.edu.twKeywords:ZnO,supercriticalfluidEstimationofthelengthofthemanuscript NumberofPages13x2503250NumberofTables1x150150NumberofFigures8x1501200TOTALNUMBEROFWORDS=4600Effectoflow-temperaturesupercriti
3、calfluidtechnologytreatmentontheperformanceofZnOTFTsMin-ChenChen(a,Ting-ChangChang(a,b,Sheng-YaoHuang(a,Kuan-ChangChang(c,Hui-ChunHuang(d,Shih-ChingChen(a,JinLu(a,Der-ShinGan(d,New-JinHo(d,Tai-FaYoung(c,Geng-WeiJhang(e,Ya-HsiangTai(ea.DepartmentofPhysics,NationalSunYat-SenUniversity,Kaohsiung,8
4、04,Taiwan,R.O.C.b.CenterforNanoscience&Nanotechnology,NationalSunYat-SenUniversity,Kaohsiung,804,Taiwan,R.O.C.c.DepartmentofMechanicalandElectro-MechanicalEngineering,NationalSunYat-SenUniversity,Kaohsiung,804,Taiwan,R.O.C.d.DepartmentofMaterialsScienceandEngineering,NationalSunYat-SenUniversit
5、y,Kaohsiung,804,Taiwan,R.O.C.e.DepartmentofDisplayInstitute,NationalChiaoTungUniversity,Hsin-Chu,300,Taiwan,R.O.C.AbstractInthispaper,thesupercriticalCO2(SCCO2)fluidtechnologyissuccessfullyappliedtoimprovetheelectricalcharacteristicsofsputteredZnOTFTsatlowtemperature(150°C).AfterthetreatmentofS
6、CCO2fluidsmixedwithwater,theZnOTFTexhibitedsuperiortransfercharacteristicsandlowerthresholdvoltage.AccordingtoX-rayphotoelectronspectroscopy(XPS)analyses,theimprovementswereattributedtotheincreaseofbindingenergiesofZn-Obonds,hydrogen-relateddonorsandthereductionoftrapsatthegrainboundaryinZnOthi
7、nfilms.Inaddition,thecrystallinequality,physicalstructure,andtransmittanceofZnOthinfilmswerealsoinvestigatedbyusingX-raydiffraction(XRD),transmissionelectronmicroscopy(TEM)andN&Kanalyzer.IntroductionIntherecentyears,thinfilmtransi
