GB∕T 20230-2022 磷化铟单晶

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犐犆犛２９．０４５犆犆犛犎８３中华人民共和国国家标准犌犅／犜２０２３０—２０２２代替犌犅／犜２０２３０—２００６磷化铟单晶犐狀犱犻狌犿狆犺狅狊狆犺犻犱犲狊犻狀犵犾犲犮狉狔狊狋犪犾２０２２０３０９发布２０２２１００１实施国家市场监督管理总局发布国家标准化管理委员会

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2犌犅／犜２０２３０—２０２２#$%&'１()!"#67R:(;<=0ab、LMKm、ef、6,、&¢、£¤、:;、<=3¥¦"#t§¨<©ª。!"#ST5>*hj、éj?#T0:(;<=`t:(;<=ghi。２*(+,-./P@"#Ô0©ªAB"Ô06UFCTD2E!"#Fº³G0HI。uÔ，¯JK0CT"#，LMJKNO0Z!ST5!"#；º¯JK0CT"#，uPëZ!（£Qßä09G<）ST5!"#。ＧＢ／Ｔ１５５５Ä+Å<==r7efＧＢ／Ｔ２８２８．１—２０１２RSTU-１./：$VWå（ＡＱＬ）X0YSRZＧＢ／Ｔ４３２６o![Ä+Å<=\]^_`3\]aefＧＢ／Ｔ６６１８bi3N(efＧＢ／Ｔ６６２４bghicefＧＢ／Ｔ１３３８８bic1=krＸdefＧＢ／Ｔ１４２６４Ä+ÅÈÉM]ＧＢ／Ｔ１９９２１bghicefＧＢ／Ｔ２６０６７bieÓfgefＧＢ／Ｔ３２２７８h(b<=iiCefＳＪ／Ｔ１１４８８Äjkl(mjn`、\]a3^_`ef３01234ＧＢ／Ｔ１４２６４o70M]37^ST5!"#。４56４．１#$%&'7:(;<=`0abcdefOP：□ＩｎＰ□（）〈〉cd=rcd+jpn，Qb©Tqÿrbcdpstcd:(;<=`cd<=0ýuef１

3犌犅／犜２０２３０—２０２２89：ＶＧＦＩｎＰｎ（Ｓ）〈１００〉cdvwxyfýu0ｎnpz、=r8〈１００〉0:(;<=`。４．２#$%&':;<:(;<=ghi0abcdefOP：□ＩｎＰ□□（）（）□／□□cd}~{¾cd|gh（Ｐ）}~（Ｅ））cdgh（Ｐcdcrcd+jpn，Qb©Tqÿrbcdpstcdghicd<=0ýuef89：ＬＥＣＩｎＰ７６．２ｐ（Ｚｎ）（１００）Ｐ／ＰⅡcdfýu0７６．２ｍｍ、ｐnpＺｎ、cr8（１００）、ygh、}~{¾8Ⅱ{0:(;<=ghi。５=0>?５．１#$%&'7@+５．１．１AB+C:(;<=`0jkFlOrc１067。D１AB+Cjn`Õ^_`+jpnpstΩ·ｃｍｃｍ－３ｃｍ２／（Ｖ·ｓ）Ｓ０．１×１０－３～６×１０－３≥８×１０１７≥１０００ｎnＳｎ１×１０－３～６×１０－３≥５×１０１７≥１０００op—≤１×１０１６≥３５００ｐnＺｎ—≥５×１０１７≥５０Äjkn（ＳＩ）Ｆｅ≥１×１０７—≥１０００５．１．２'E:(;<=`0=r8〈１００〉。５．１．３FGHI:(;<=`0}~Orc２067。２

4犌犅／犜２０２３０—２０２２D２FGHI}~{¾／ｃｍ２Ⅰ≤５×１０２Ⅱ≤５×１０３Ⅲ≤１×１０４Ⅳ≤５×１０４Ⅴ≤１×１０５５．１．４JKLM:(;<=`0cO、s、é。５．２#$%&':;<@+５．２．１AB+C、FGHI:(;<=ghi0jkFl、}~O/¾r:(;<=`FÔ５．１．１、５．１．３0Km，ÁweÏwNO:(;<=`01。５．２．２DNOEPQRST:(;<=ghi0crt'&Orc３067。D３DNOEPQRST'&crtJcrcreÓ'r（１００）±０．３°（０１１）±０．５°Jcer９０°±５°（０１０）±１°５．２．３UVWX:(;<=ghi0Orc４067。D４UVWXttJcucuN(（犜犜犞）（犠犪狉狆）d（犜犐犚）ttμｍμｍμｍｍｍμｍｍｍｍｍＰ／ＥＰ／ＰＰ／ＥＰ／ＰＰ／ＥＰ／Ｐ５０．８±０．５３５０±２５１６．０±２．０８．０±２．０≤８≤６≤１０≤８≤６≤６７６．２±０．５６００±２５２２．０±２．０１１．０±２．０≤１０≤８≤１２≤１０≤８≤６１００．０±０．５６２５±２５３２．５±２．０１８．０±２．０≤１２≤１０≤１５≤１２≤１０≤８１５０．０±０．５６７５±２５eÓ，r１067—≤２０—≤２０—≤１５３

5犌犅／犜２０２３０—２０２２切口基准轴切口切口角度90°^：:晶片边缘切口深度1.00Y１Z[Y8P>?５．２．４DNLM:(;<=ghicO=、Z、、 、¡、¢£、¤¥}¦§。５．２．５DN\]:(;<=ghic0Orc５067。D５DN\]ºÎ:(;<=ghic0fg／i５０．８ｍｍ７６．２ｍｍ１００．０ｍｍ１５０．０ｍｍ≥０．５μｍ≤１００≤２００≤４００≤６００^：xeON:(;<=ghi0cä¨Km，Áwxyez{|7。６_`ab６．１#$%&'7６．１．１AB+C６．１．１．１:(;<=`+jpn0$ＧＢ／Ｔ４３２６067©¦。６．１．１．２ｎn、ｐn:(;<=`Õ、^_`stｎn:(;<=`jn`0$ＧＢ／Ｔ４３２６067©¦。６．１．１．３Äjkn:(;<=`jn`、^_`0$ＳＪ／Ｔ１１４８８067©¦。６．１．２'E:(;<=`=r0$ＧＢ／Ｔ１５５５067©¦。６．１．３FGHI:(;<=`}~0$«¬Ａ067©¦，Reª0«Áwxyez{|7。４

6犌犅／犜２０２３０—２０２２６．１．４JKLM:(;<=`I¬0T®Jh¯P°±。６．２#$%&':;<６．２．１DNOEPQRST６．２．１．１:(;<=ghicr0$ＧＢ／Ｔ１５５５067©¦。６．２．１．２:(;<=ghiJcrteÓ'r0$ＧＢ／Ｔ１３３８８067©¦。６．２．１．３:(;<=ghicr0T²³'|Km0´f©¦。６．２．２UVWX６．２．２．１:(;<=ghi、Jcu、cu0Tµ8０．０２ｍｍ0¶©¦。６．２．２．２:(;<=ghi0$ＧＢ／Ｔ６６１８Ô670/·¸ªef©¦。６．２．２．３:(;<=ghieÓfg0$ＧＢ／Ｔ２６０６７067©¦。６．２．２．４:(;<=ghiN(、、d0$ＧＢ／Ｔ３２２７８067©¦。６．２．３DNLM:(;<=ghic0$ＧＢ／Ｔ６６２４067©¦。６．２．４DN\]:(;<=ghic0$ＧＢ／Ｔ１９９２１067©¦。７c`*d７．１c`2`e７．１．１¹ºÁwe}-Üe©¦，»¼¹ºr!"#t§¨<067。７．１．２xe³NW½0¹º$!"#067©¦。O1>!"#t§¨<067ºr，O®W½¹º¾J4Ü¿©s#ÀªrweÏÐ，Áwxyez{ÁÂ。OxÃÄ，OÁwxyez{|7。７．２fg７．２．１:(;<=`OEÏÅW。ÆOÁÎ_Ç:(;<=`E。７．２．２:(;<=ghiOEÏÅW。ÆOÁÎ_ab，ѳÈÉý¹H#0:(;<=`\)0:(;<=ghiE。７．３c`hiPOj７．３．１:(;<=`0tOrc６067。５

7犌犅／犜２０２３０—２０２２D６#$%&'7kc`hiPOjUbKmLMKm0XHbef0XHb１jkFlÆ`Ê、ËÌ１i５．１．１６．１．１２=r５．１．２６．１．２Æ`Ê、ËÌ１i３}~５．１．３６．１．３４I¬Y`５．１．４６．１．４７．３．２:(;<=ghi0tOrc７067。D７#$%&':;

8犌犅／犜２０２３０—２０２２８．２pq８．２．１:(;<=`¤çèé0êÉë©ì，áçäí0îï©，ðñ磤ܩ。８．２．２:(;<=ghi¤çèé0£¤iÕ©©¦BTÔ012tEº12。ｄ）¹º3T4Ù：|5:、3T、<=ef。ｅ）uv。９xy&z{xe³Ç6780xK，®§9!"#ß@¹º0§¨<©，@ÐOP©ª：ａ）¹ºÚÛ；ｂ）¹º6Î；ｃ）¹º；ｄ）!"#Db；ｅ）!"#ÔKm®§¨<Ô¯Ù0©ª；ｆ）ST0£¤Km；ｇ）uv。７

9犌犅／犜２０２３０—２０２２|}犃（*(+）#$%&'FGHIk~_ab犃．１:(;<=Ô}~'V0=ÎÌ·ý:N，®_7H#P，±²(k~N=Å;<./ä=>~*T，®=ÅcÖ0}~?Ê@~ABC，©DÀE¶ä7ÀD0~。®EéFP¬GÑ$_76,HRI²~，<}°JK©0~L8}~。犃．２_犃．２．１:M：/８５％，/NOtsÖ。犃．２．２P(Q：/４０％，/NOtsÖ。犃．２．３RÕÍ：jn`S5５ＭΩ·ｃｍ（§T）。犃．３í?EéF，áSÐ8１００Ð～５００Ð。犃．４_`犃．４．１jU:(;<=`eVEcr（１００）±５°0=iì，ïÝW、yghì，3cXFDY、ZZ，¾ìTRÕÍ"[、#$。犃．４．２~8:M、P(Q0\，uÅK@8Ｈ３ＰＯ４∶ＨＢｒ＝１∶２，]T]^。犃．４．３jUºáçë^>0~©，_TP~３ｍｉｎ～４ｍｉｎ。~`EìUºÐ，TRÕÍa[ºG5５7，Uºc0(kt[é，b#。犃．４．４NUºñ5í?EéFcdÖ，«=áSÐ8１００Ð，efCºc，gh}~。Ç6}~（犖ｄ），«°JK：ａ）犖ｄ≤５０００，«T°JK犛≥０．０１ｃｍ２；ｂ）５０００＜犖ｄ≤１００００，«T°JK犛≥０．００５ｃｍ２；ｃ）１００００＜犖ｄ≤５００００，«T°JK犛≥０．００１ｃｍ２；ｄ）犖ｄ＞５００００，«T°JK犛≥０．０００５ｃｍ２。犃．４．５X犃．４．５．１dN5}~Þ5５０００／ｃｍ２0:(;<=，*«TÂii¸Ref，¶ÅRefj³Áwxyez{|7。８

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