资源描述：
《new linear ultrasonic mocromotor for precisions外语英文电子书》由会员上传分享，免费在线阅读，更多相关内容在教育资源-天天文库。
1、Piezo•Nano•PositioningNewLinearUltrasonicMicroMotorforPrecisionMechatronicSystemsK.Spanner,O.Vyshnevskyy,W.WischnewskiyPhysikInstrumente(PI)GmbH&Co.KG,Karlsruhe,GermanyAbstract:ThispaperpresentsanewdesignforalinearultrasonicmicromotorforprecisionpositioningdevelopedbyPhysi
2、kInstrumente(PI).Thestatoroftheultrasonicmotorconsistsofarectangularpiezoceramicplate.Twosliders,bondedtoaspringwhichpressesthemagainstthestator,movealongguidesintegratedinthestator.Thesemotorsarecharacterizedbytheirextremelysimpleconstruction.Twoprototypesofthemotorsusing
3、a339x4x1.5mmanda16x8x1.5mmpiezoceramicplatehavebeendesignedandtested.Withanexternalpositionsensorandservo-controller,themotorscanbedriventopositionsinthe0.1µmrange.Inopen-loopmode,repeatablestepsizeisinthemicronrange.Maximumspeedofthemotorsisaround100mm/s.Inclosed-loopmode
4、,speedsinthemillimeterpersecondrangearepossible.Thedesignandoperatingcharacteristicsoftheprototypesinbothopen-andclosed-loopmodesarepresentedinthispaper.Toobtaintheproperstatorgeometry,FEMsoftwarewasusedandthevibrationalbehaviorofthesystemwasanalyzedwitha3Dscanningvibromet
5、er.TheFEMsimulations,aswellastheresultsofthelaservibrometermeasurements,willbepresentedasanimations.Keywords:piezomotor,PZT,ultrasonicmotor,standing-wave,piezoelectricactuators,linearmotor,piezo,non-magnetic,piezoceramicIntroduction®Piezoelectricultrasonicmotors(PUMs)havea
6、elementsinthePILineseriesemployasymmetricnumberofadvantagesoverelectromagneticmotors.excitionofthe(3,1)piezo-modeinarectangularPUMscanachievepositioningaccuraciesinthepiezoceramicplate[4],[5],[6].Theactuatorscanberangeofseveraltensofnanometers.Theyholdtheirscaledatwillandc
7、anbeusedforpracticallyanypositionsevenwhenpowereddownandthusmechatronicsapplication.Figure1showsminiatureconsumelessenergy.PUMscanbeconstructedwithrotaryandlinearpiezomotorsmadeatPI.significantlyfewerparts.Theefficiencyofelectromagneticmotorsfallsastheirdimensionsarereduce
8、d,butthatofPUMsstaysvirtuallyconstant[1].Linearelectromagneticmotorsareverydifficulttodes
