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《一种精密电容测量薄膜平面扩张的第三部分：导体和半导体材料 圆弧型柔性铰链刚度特性分析 柔性铰链 相关外文翻译》由会员上传分享，免费在线阅读，更多相关内容在工程资料-天天文库。
1、外文翻译毕业设计题目：柔性铰链微运动的测量与控制方法原文1：APrecisionCapacitanceCellforMeasurementofThinFilmOut-of-PlaneExpansion–PartIII:ConductingandSemiconductingMaterials译文1：一种精密电容测量薄膜平面扩张的第三部分：导体和半导体材料原文2：Circularareflexiblehingestiffnesscharacteranalysis译文2：圆弧型柔性铰链刚度特性分析AP
2、recisionCapacitanceCellforMeasurementofThinFilmOut-of-PlaneExpansion–PartIII:ConductingandSemiconductingMaterialsAbstract—Thispaperdescribestheconstruction,calibration,anduseofaprecisioncapacitance-basedmetrologyforthemeasurementofthethermalandhygrot
3、hermal(swelling)expansionofthinfilms.Itisdemonstratedthatwiththisversionofourcapacitancecell,materialsranginginelectricalpropertiesfrominsulatorstoconductorscanbemeasured.Theresultsofourmeasurementsonp-type<100>-orientedsinglecrystalsiliconarecompare
4、dtotherecommendedstandardreferencevaluesfromtheliteratureandareshowntobeinexcellentagreement.IndexTerms—Capacitancecell,coefficientofthermalexpansion(CTE),guardedelectrode,highsensitivitydisplacement,innerlayerdielectrics,polymers,thinfilms.I.INTRODU
5、CTIONTHEcoefficientofthermalexpansion(CTE)isakeydesignparameterinmanyapplications.Itisusedforestimatingdimensionaltolerancesandthermalstressmismatches.Thelatterisofgreatimportancetotheelectronicsindustry,wherethermalstressescanleadtodevicefailure.For
6、accuratemodelingofthesesystems,reliablevaluesareneededfortheCTE.Traditionally,displacementgaugetechniquessuchasthermomechanicalanalysis(TMA)havebeenutilizedfordeterminingtheCTE.However,standardtestmethodsbasedonthesetechniquesarelimitedtodimensionsgr
7、eaterthan100m[1-2].Thisisproblematicformaterialswhichcanbeformedonlyasthinlayers(suchascoatingsandcertaininnerlayerdielectrics).Additionally,thereissomequestionastowhethervaluesobtainedonlargersamples(bulkmaterial)arethesameasthoseobtainedforthinfilm
8、s,evenwhentheeffectsoflateralconstraintsareincludedinthecalculations.Ithaslongbeenrecognizedthatcapacitance-basedmeasurements,inprinciple,canofferthenecessaryresolutionforthesefilms.Forapairofplane-parallelplatecapacitors,ifthesampleisusedtosetthespa
