最新MOS电路版图设计规则解析PPT课件.ppt

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1、MOS电路版图设计规则解析一、几点说明1.MASKNAMES(Layer)PW---DefinitionofP-Well.NW---DefinitionofN-Well.OD---Definitionofthinoxidefordevice,andinterconnection.PO---DefinitionofPoly-Si.PP---DefinitionofP+implantation.NP---DefinitionofN+implantation.CO---DefinitionofcontactwindowfromM1toODorPO.M1

2、---Definitionof1stmetalforinterconnection.VIA1--Definitionofvia1holebetweenM2andM1.M2---Definitionof2ndmetalforinterconnection.CB---Definitionofbondingpad.2.TerminologyDefinitionsforRegionN+OD:ODcoveredwithNP.P+OD:ODcoveredwithPP.ColdN-Well:N-Wellconnectedtothemostpositivevol

3、tage(Vdd).HotN-Well:N-WellnotconnectedtothemostpositivevoltageHotN+diffusion:allN+diffusionregionsoutsidetheN-Wellwhichhaveapotentialnotequaltothesubstratevoltage.HotP+diffusion:allP+diffusionregionsinsidetheN-WellwhichhaveapotentialnotequaltotheN-Wellpotential.Colddiffusions

4、:OutsideN-Well:adiffusionwhichhasthepotentialthesameasthesubstrate.InsideN-Well:adiffusionwhichhasthepotentialthesameastheN-Well.3.TerminologyDefinitionsforRuleWIDTHSPACE:CLEARANCE:EXTENSION:OVERLAP:哈工大微电子中心来逢昌二、N-WellRuleNW.W.1MinimumdimensionofaNWregionA1.2mNW.S.1Minimumsp

5、acebetweentowNWregionsB2.0mwithdifferentpotential(includeNWresistor)NW.W.2MinimumdimensionofahotNWregionA13.0m(NWresistance)NW.S.2MinimumspacebetweentowNWregionsC0.6mwiththesamepotentialMergeifspaceislessthan0.6mNWNWPWAAA1BC哈工大微电子中心来逢昌六、N+S/DRule(Nplus)NP.W.1Minimumwidtho

6、fanNPregionA0.44mNP.S.1MinimumspacebetweentwoNPregionsB0.44mMergeifthespaceislessthan0.44umNP.C.1MinimumclearancefromanNPregionC0.26mtoanP+activeODregionNP.C.2MinimumclearancefromanNPregionC10.14mtoanonbuttededgeofP-wellpick-upP+ODregionNP.C.3MinimumclearancefromanNPedgeD

7、*,E0.32mtoaN-ChannelPOgateNP.O.1MinimumoverlapfromanNPedgeF0.32mtoanODregionNP.E.1MinimumextensionofanNPregionG0.26mbeyondaN+activeregionNP.E.2MinimumextensionofanNPregionH0.04mbeyondaNwellpick-upN+ODregionNP.C.5ClearancefromaNPregiontothebutted*0.0medgeofabutteddiffusio

8、nP+OD(insideP-well)PPP+ODNPP-WellN-WellAAPPNPPPPPHN+ODN+ODN+ODP+ODP+