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1、InvestigationandResearchMicroManufacturingandMicroSystemsMicro-Manufacturing01Micro-Manufacturingfeaturescanbedividedintothreecategories:1~10mm,1μm~1mmmicro-mechanmicro-mechanicalical,1nm~10μmnano-machinery.Micro-fabricationismanufacturingconductedinsizeoftheho
2、rizontalmicrometerornanometer.MicrofabricationmachinesMicronprocessingThemicro-millingprocessisaversatileandconvenientprocessformanufacturingthree-dimensionalmicrostructures.Micro-drillingismainlydrillingmicron-sizedholes.Micro-millingmachineDrillbitsformicro-d
3、rillingmachinesNanotechnologyNanodevicesanddeviceshavetheadvantagesofgreen,small,efficientandresource-saving.10nmprocesschips(Snapdragon835)Superhydrophobicnano-materialsNanotechnologyhasbeenusedinmanyareas,includingautomotive,aerospace,householdappliances,spor
4、tinggoods,telecommunicationsequipmentandmedicalsupplies.NanoscalerobotsforcancertreatmentNanogearsCarbonnanotubesareconsideredtobeexcellentmaterialsduetotheiruniquemechanical,electronicandchemicalproperties.Carbonnanotubescanbeusedinelectronicequipment,supercap
5、acitors,lithium-ionbatteries,fieldemissionimaging,fuelcells,actuators,chemicalandbiosensors,andelectronicsources.CarbonnanotubesCarbonnanotubesCarbonnanotubesolarcellsMicrochannelheatexchangershavebeenappliedanddevelopedintermsofheattransfer.Theuseofthismicroch
6、annelheatexchangercanproduceacompact,reliable,powerful,portabilityandhigh-throughputmicro-scalecombustionsystem.MicrochannelheatexchangerNano-dressingisaprocessthatcanprovideadvancedmaterialmolding.Nano-dressingofthetubeMicroSystems02Microsystembasedonmicron-sc
7、aletheory,withthewholesalemicroelectronicstechnologyandthree-dimensionalprocessingtechnologytocompletetheinformationacquisition,processingandimplementationfunctions.Microsystemsaresystemsthatintegratemicroelectronicsandmicromechanics.Applicationofmicro-systemin
8、micro-robotMicroelectronicdevicesMicro-weldingCPUtechnologydevelopmentprocessMicro-systemisashortresponse,fast,highprecisionsystem.Micro-electromechanicalsystems(MEMS)havebe
