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1、Basedonaroundnessmeasuringinstrument,theparalleldegreeofplanenessmeasuringmethodYangWeichuanWangBaoruiYuanDaochengHighprecisioncoordinatemeasuringmachinesingleaxismeasurementuncertaintyU95isabout0.6m,plusthestraightnesserror,thenthecoordinatemeasurementmachineforparalle
2、lism,theflatnessmeasurementuncertaintyU95isabout1m.Equalthicknessinterferometercansolvetheproblemofhighprecisionflatnessmeasurementissues(suchasflatcrystaltest),buttheparallelismislackofhigherprecisionmeasurementmethod,andwhenthemeasurementsneedtopartendonspecificpoints
3、,equalthicknessinterferometerisincapableofaction.Intheroundnessmeasuringinstrumentwithhighaccuracy,withoutchanginganyhardwareandsoftwarecansolvetheaboveproblem.Roundnessofcylindricalfaceflatnessandparallelismmeasurementisavailablethroughtheworkspindlerotatingcircularmot
4、ionandthetransversearmtodrivethemeasuringheadradialmovement,measurementdatapointsinseveralconcentricdistribution.Becauseinordertorealizethemulticircleroundnessmeasuringinstrumentforminingpointmeasurement,mustbeintheendsurfaceoftheworkpieceismovedradiallyprobe,whichwould
5、beroundnessinstrumentarmguiderailstraightnessandrelativetothespindleisnotperpendiculartotheflatnessandparallelismmeasurement,thetwoerrordirectlyaffectsthefinalmeasurementresultstherefore,itmustbecorrected.Measurementmethodisdividedintotwosteps:thetrackcorrectionandmeasu
6、rementofminingpoint;trackcorrectionisroundnessinstrumentheadinanalignmentaflatcrystalworkingsurfacemeasurementinastraightline,itsrelativetotheapparatusmainshaftangle,thenaccordingtotheanglecorrectioninthepracticalmeasurementdata.Measuringmethod:intheroundnessinstrumentt
7、ableplacedflatcrystalandrelativeturntablespindleforlevel,thenthemeasuredpartisplacedonaflatcrystal,theroundnessinstrumentturntablerotationandarmmotioninastraightline,themeasuringheadinflatcrystalismeasuredbytheconcentriccirculardatapoints,thecoordinatesconvertedtoCartes
8、iancoordinates,andthenthroughtheanalysisofthesedata,wecanobtainthemeasuredflatnessflatnessandparallelism.Theme
