CUSP磁场对8英寸半导体级硅晶体生长的影响(全球半导体晶体生长模拟著名商业软件FEMAG).ppt

《CUSP磁场对8英寸半导体级硅晶体生长的影响(全球半导体晶体生长模拟著名商业软件FEMAG).ppt》由会员上传分享，免费在线阅读，更多相关内容在教育资源-天天文库。

1、全球半导体晶体生长模拟著名商业软件FEMAG--CUSP磁场对8英寸半导体级硅晶体生长的影响ReportBrukerASCFeb,9,2012FEMAGSoft©2012FEMAGSoft©2012OBJECTIVEPROCESSCONDITIONCZfurnace-8inchdiametercrystal,24inchdiametercrucibleTopredicttheimpactofaCUSPmagneticfieldoperatingat140Awiththeneutral-axislocatedonthemeltfreesurfa

2、ce.SIMULATIONPROCESSThegrowthprocessismodeledasTimedependentsimulationtakingintoaccountthetransienteffectstakingplaceduringthegrowthofthecrystalPARAMETERSOBSERVEDTheconcentrationoftheOxygeninthemeltandcrystal.TheconcentrationofthePhosphorousinthemeltandcrystalTheconcentrati

3、onoftheCarboninthemeltandcrystalFEMAGSoft©2012CRYSTALRADIALOXYGENMEASUREMENTPOSITIONSFEMAGSoft©2011PREDICTIONOFRADIALOXYGENCONCENTRATIONFEMAGSoft©2012PREDICTIONOFRADIALOXYGENCONCENTRATIONFEMAGSoft©2012PREDICTIONOFOXYGENCONCENTRATIONALONGTHEHEIGHTOFTHECRYSTALFEMAGSoft©2012PR

4、EDICTIONOFCARBONCONCENTRATIONALONGTHEHEIGHTOFTHECRYSTALFEMAGSoft©2012PREDICTIONOFPHOSPHOROUSCONCENTRATIONALONGTHEHEIGHTOFTHECRYSTALFEMAGSoft©2012CUSPvsNOCUSP-OXYGENCONCENTRATION-CRYSTALFEMAGSoft©2012CUSPvsNOCUSP-CARBONCONCENTRATION-CRYSTALFEMAGSoft©2012CUSPvsNOCUSP-PHOSPHOR

5、OUSCONCENTRATION-CRYSTALFEMAGSoft©2011CUSPvsNOCUSP-PHOSPHORUSRESISTIVITY-CRYSTALFEMAGSoft©2011PREDICTIONOFRADIALPHOSPHORUSRESISTIVITYFEMAGSoft©2012NOCUSPVSCUSPTEMPERATUREINTHEMELTAnimation–Temperature-melt.aviFEMAGSoft©2012NOCUSPvsCUSP–MELTTURBULENTVISCOSITYAnimation–Turbul

6、entviscosity-melt.aviFEMAGSoft©2012NOCUSPvsCUSP-VELOCITY&STREAMFUNCTIONAnimation-psi-melt.aviFEMAGSoft©2012NOCUSPvsCUSP-OXYGENINTHEMELTAnimation-Oxygen-melt.aviFEMAGSoft©2012NOCUSPvsCUSP-PHOSPHOROUSINTHEMELT-1Animation-Phosphorous-melt.aviFEMAGSoft©2012NOCUSPvsCUSP-PHOSPHOR

7、OUSINTHEMELT-2Animation-Phosphorous-melt2.aviFEMAGSoft©2012NOCUSPvsCUSP-CARBONINTHEMELT-1Animation-Carbon-melt.aviFEMAGSoft©2012NOCUSPvsCUSP-CARBONINTHEMELT-2Animation-Carbon-melt2.aviFEMAGSoft©2012NOCUSPvsCUSP-OXYGENINTHECRYSTALAnimation-Oxygen-ppm.aviFEMAGSoft©2012NOCUSPv

8、sCUSP-PHOSPHOROUSINTHECRYSTALAnimation-Phosphorous-cry.aviFEMAGSoft©2012CUSPvsNOCU