全球半导体晶体生长仿真著名商业软件femag-cusp磁场对8英寸半导体级硅晶体生长的影响

《全球半导体晶体生长仿真著名商业软件femag-cusp磁场对8英寸半导体级硅晶体生长的影响》由会员上传分享，免费在线阅读，更多相关内容在教育资源-天天文库。

1、全球半导体晶体生长仿真著名商业软件FEMAG--CUSP磁场对8英寸半导体级硅晶体生长的影响ReportBrukerASCFeb,9,2012FEMAGSoft©2012FEMAGSoft©2012OBJECTIVEPROCESSCONDITIONCZfurnace-8inchdiametercrystal,24inchdiametercrucibleTopredicttheimpactofaCUSPmagneticfieldoperatingat140Awiththeneutral-axislocated

2、onthemeltfreesurface.SIMULATIONPROCESSThegrowthprocessismodeledasTimedependentsimulationtakingintoaccountthetransienteffectstakingplaceduringthegrowthofthecrystalPARAMETERSOBSERVEDTheconcentrationoftheOxygeninthemeltandcrystal.TheconcentrationofthePhosphor

3、ousinthemeltandcrystalTheconcentrationoftheCarboninthemeltandcrystalFEMAGSoft©2012CRYSTALRADIALOXYGENMEASUREMENTPOSITIONSFEMAGSoft©2011PREDICTIONOFRADIALOXYGENCONCENTRATIONFEMAGSoft©2012PREDICTIONOFRADIALOXYGENCONCENTRATIONFEMAGSoft©2012PREDICTIONOFOXYGENC

4、ONCENTRATIONALONGTHEHEIGHTOFTHECRYSTALFEMAGSoft©2012PREDICTIONOFCARBONCONCENTRATIONALONGTHEHEIGHTOFTHECRYSTALFEMAGSoft©2012PREDICTIONOFPHOSPHOROUSCONCENTRATIONALONGTHEHEIGHTOFTHECRYSTALFEMAGSoft©2012CUSPvsNOCUSP-OXYGENCONCENTRATION-CRYSTALFEMAGSoft©2012CUS

5、PvsNOCUSP-CARBONCONCENTRATION-CRYSTALFEMAGSoft©2012CUSPvsNOCUSP-PHOSPHOROUSCONCENTRATION-CRYSTALFEMAGSoft©2011CUSPvsNOCUSP-PHOSPHORUSRESISTIVITY-CRYSTALFEMAGSoft©2011PREDICTIONOFRADIALPHOSPHORUSRESISTIVITYFEMAGSoft©2012NOCUSPVSCUSPTEMPERATUREINTHEMELTAnima

6、tion–Temperature-melt.aviFEMAGSoft©2012NOCUSPvsCUSP–MELTTURBULENTVISCOSITYAnimation–Turbulentviscosity-melt.aviFEMAGSoft©2012NOCUSPvsCUSP-VELOCITY&STREAMFUNCTIONAnimation-psi-melt.aviFEMAGSoft©2012NOCUSPvsCUSP-OXYGENINTHEMELTAnimation-Oxygen-melt.aviFEMAGS

7、oft©2012NOCUSPvsCUSP-PHOSPHOROUSINTHEMELT-1Animation-Phosphorous-melt.aviFEMAGSoft©2012NOCUSPvsCUSP-PHOSPHOROUSINTHEMELT-2Animation-Phosphorous-melt2.aviFEMAGSoft©2012NOCUSPvsCUSP-CARBONINTHEMELT-1Animation-Carbon-melt.aviFEMAGSoft©2012NOCUSPvsCUSP-CARBONI

8、NTHEMELT-2Animation-Carbon-melt2.aviFEMAGSoft©2012NOCUSPvsCUSP-OXYGENINTHECRYSTALAnimation-Oxygen-ppm.aviFEMAGSoft©2012NOCUSPvsCUSP-PHOSPHOROUSINTHECRYSTALAnimation-Phosphorous-cry.aviFEMAGSoft©2012CUSPvsNOCU