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1、外文原文1.GasSensor1.1gassensorresearchanddevelopmentstatussensingtechnologyofinformationtechnologyBianTechnology,intheaerospace,military,theenvironment,securitychecksandotherfieldsextensiveuseofgasgassensorforreal-timemonitoring,alarm,andinthefood,chemicalandotherindustrialareasalsomakesextensiveu
2、seofgassensorsforgasodoridentification.Applicationofdemand-drivengassensortechnologyofrapidgrowth,indomesticandinternationalresearchinthisareacontinuedtodeepen,hasdevelopedmanydifferenttypesofgassensors,cansatisfydifferentrequirementsoftheoccasion.Putgassensorsandspecializedintegratedcircuitdet
3、ectionanalysis,specificgastothequantitativedetectionofsemi-quantitativeanalysis.Inthesegassensors,metaloxidesemiconductorgassensorisaresultofthelowprices,facilitatethemassproductionofthefeature,resultinginmoreapplications[11].Metaloxidesemiconductorgassensoristheuseofasemiconductormaterialparti
4、clesspecificgasadsorptionsurfaceresistivityvaluechangesinthecharacteristicsmade,anditisaresistance-typesensor,mostwereforthedetectionofflammablegastargetsResistancevalueofitsgasandtheconcentrationofgashassomerelationship.Traditionalstructureofthemetaloxidegassensorisnotonlylarger,andthehugepowe
5、rconsumptionisveryhigh,Inmanyoccasions,unabletomeettherequirementsofgood,Meanwhilethedemandofthemarketrequirementsofthedevelopmentofgassensordevicesusemoreconvenient,cheaperprice,Thereforemicro-sensorresearchanddevelopmentistheinevitabledirectionofthecontinuousdevelopmentofsensortechnologyforth
6、enewgenerationofgassensorsDevelopmenthaslaidasolidfoundation.Usingmaturesemiconductormicroelectronicsandthick-filmtechnology,thinfilmtechnologymanufacturinggassensors,micro-devicescouldbeachieved,Integration,andreducethepowerconsumptionofdevices,andsensordevicestoenablemassproduction,thusreduci
7、ngthecost,Meanwhilesensorconsistencyandreliabilitycanbeguaranteed.Inthe20thcentury,sincethe1990s,micro-machining(MEMS)technologytothesensormanufacturingtechnologychanges,MEMStechnologyusedtocreatethegassensorperformancehasbeenfurt
